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Krueger NA, Holsteen AL, Kang SK, et al. Porous Silicon Gradient Refractive Index Micro-Optics. Nano Lett. 2016;16(12):7402-7407doi: 10.1021/acs.nanolett.6b02939.
Krueger, N. A., Holsteen, A. L., Kang, S. K., Ocier, C. R., Zhou, W., Mensing, G., Rogers, J. A., Brongersma, M. L., & Braun, P. V. (2016). Porous Silicon Gradient Refractive Index Micro-Optics. Nano letters, 16(12), 7402-7407. https://doi.org/10.1021/acs.nanolett.6b02939
Krueger, Neil A, et al. "Porous Silicon Gradient Refractive Index Micro-Optics." Nano letters vol. 16,12 (2016): 7402-7407. doi: https://doi.org/10.1021/acs.nanolett.6b02939
Krueger NA, Holsteen AL, Kang SK, Ocier CR, Zhou W, Mensing G, Rogers JA, Brongersma ML, Braun PV. Porous Silicon Gradient Refractive Index Micro-Optics. Nano Lett. 2016 Dec 14;16(12):7402-7407. doi: 10.1021/acs.nanolett.6b02939. Epub 2016 Nov 07. PMID: 27797522.
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Nano Lett. 2016 Dec 14;16(12):7402-7407. doi: 10.1021/acs.nanolett.6b02939. Epub 2016 Nov 07.

Porous Silicon Gradient Refractive Index Micro-Optics.

Nano letters

Neil A Krueger, Aaron L Holsteen, Seung-Kyun Kang, Christian R Ocier, Weijun Zhou, Glennys Mensing, John A Rogers, Mark L Brongersma, Paul V Braun

Affiliations

  1. Department of Materials Science and Engineering, Department of Chemistry, Frederick Seitz Materials Research Laboratory, and Beckman Institute, University of Illinois at Urbana-Champaign , Urbana, Illinois 61801, United States.
  2. Geballe Laboratory for Advanced Materials, Stanford University , Stanford, California 94305, United States.
  3. The Dow Chemical Company, 2301 N. Brazosport Boulevard, B-1470, Freeport, Texas 77541, United States.
  4. Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign , Urbana, Illinois 61801, United States.

PMID: 27797522 DOI: 10.1021/acs.nanolett.6b02939

Abstract

The emergence and growth of transformation optics over the past decade has revitalized interest in how a gradient refractive index (GRIN) can be used to control light propagation. Two-dimensional demonstrations with lithographically defined silicon (Si) have displayed the power of GRIN optics and also represent a promising opportunity for integrating compact optical elements within Si photonic integrated circuits. Here, we demonstrate the fabrication of three-dimensional Si-based GRIN micro-optics through the shape-defined formation of porous Si (PSi). Conventional microfabrication creates Si square microcolumns (SMCs) that can be electrochemically etched into PSi elements with nanoscale porosity along the shape-defined etching pathway, which imparts the geometry with structural birefringence. Free-space characterization of the transmitted intensity distribution through a homogeneously etched PSi SMC exhibits polarization splitting behavior resembling that of dielectric metasurfaces that require considerably more laborious fabrication. Coupled birefringence/GRIN effects are studied by way of PSi SMCs etched with a linear (increasing from edge to center) GRIN profile. The transmitted intensity distribution shows polarization-selective focusing behavior with one polarization focused to a diffraction-limited spot and the orthogonal polarization focused into two laterally displaced foci. Optical thickness-based analysis readily predicts the experimentally observed phenomena, which strongly match finite-element electromagnetic simulations.

Keywords: Microlenses; birefringence; silicon photonics; transformation optics

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