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Boisen A, Thaysen J, Jensenius H, et al. Environmental sensors based on micromachined cantilevers with integrated read-out. Ultramicroscopy. 2000;82(1):11-6doi: 10.1016/s0304-3991(99)00148-5.
Boisen, A., Thaysen, J., Jensenius, H., & Hansen, O. (2000). Environmental sensors based on micromachined cantilevers with integrated read-out. Ultramicroscopy, 82(1), 11-6. https://doi.org/10.1016/s0304-3991(99)00148-5
Boisen, et al. "Environmental sensors based on micromachined cantilevers with integrated read-out." Ultramicroscopy vol. 82,1 (2000): 11-6. doi: https://doi.org/10.1016/s0304-3991(99)00148-5
Boisen A, Thaysen J, Jensenius H, Hansen O. Environmental sensors based on micromachined cantilevers with integrated read-out. Ultramicroscopy. 2000 Feb;82(1):11-6. doi: 10.1016/s0304-3991(99)00148-5. PMID: 10741646.
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Ultramicroscopy. 2000 Feb;82(1):11-6. doi: 10.1016/s0304-3991(99)00148-5.

Environmental sensors based on micromachined cantilevers with integrated read-out.

Ultramicroscopy

Boisen, Thaysen, Jensenius, Hansen

Affiliations

  1. Mikroelektronik Centret, Technical University of Denmark, Lyngby, Denmark. [email protected]

PMID: 10741646 DOI: 10.1016/s0304-3991(99)00148-5

Abstract

An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water.

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