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Kaganovich I, Misina M, Berezhnoi SV, et al. Electron boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge. Phys Rev E Stat Phys Plasmas Fluids Relat Interdiscip Topics. 2000;61(2):1875-89doi: 10.1103/physreve.61.1875.
Kaganovich, I., Misina, M., Berezhnoi, S. V., & Gijbels, R. (2000). Electron boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge. Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 61(2), 1875-89. https://doi.org/10.1103/physreve.61.1875
Kaganovich, et al. "Electron boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge." Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics vol. 61,2 (2000): 1875-89. doi: https://doi.org/10.1103/physreve.61.1875
Kaganovich I, Misina M, Berezhnoi SV, Gijbels R. Electron boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge. Phys Rev E Stat Phys Plasmas Fluids Relat Interdiscip Topics. 2000 Feb;61(2):1875-89. doi: 10.1103/physreve.61.1875. PMID: 11046473.
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Phys Rev E Stat Phys Plasmas Fluids Relat Interdiscip Topics. 2000 Feb;61(2):1875-89. doi: 10.1103/physreve.61.1875.

Electron boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge.

Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics

Kaganovich, Misina, Berezhnoi, Gijbels

Affiliations

  1. Department of Chemical Engineering, University of Houston, 4800 Calhoun Rd., Houston, Texas 77204-4792, USA.

PMID: 11046473 DOI: 10.1103/physreve.61.1875

Abstract

The electron distribution function (EDF) in an electron cyclotron resonance (ECR) discharge is far from Maxwellian. The self-consistent simulation of ECR discharges requires a calculation of the EDF on every magnetic line for various ion density profiles. The straightforward self-consistent simulation of ECR discharges using the Monte Carlo technique for the EDF calculation is very computer time expensive, since the electron and ion time scales are very different. An electron Boltzmann kinetic equation averaged over the fast electron bouncing and pitch-angle scattering was derived in order to develop an effective and operative tool for the fast modeling (FM) of low-pressure ECR discharges. An analytical solution for the EDF in a loss cone was derived. To check the validity of the FM, one-dimensional (in coordinate) and two-dimensional (in velocity) Monte Carlo simulation codes were developed. The validity of the fast modeling method is proved by comparison with the Monte Carlo simulations. The complete system of equations for FM is presented and ready for use in a comprehensive study of ECR discharges. The variations of plasma density and of wall and sheath potentials are analyzed by solving a self-consistent set of equations for the EDF.

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