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Gall-Borrut P, Belier B, Falgayrettes P, et al. Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy. J Microsc. 2001;202:34-8doi: 10.1046/j.1365-2818.2001.00802.x.
Gall-Borrut, P., Belier, B., Falgayrettes, P., Castagne, M., Bergaud, C., & Temple-Boyer, P. (2001). Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy. Journal of microscopy, 20234-8. https://doi.org/10.1046/j.1365-2818.2001.00802.x
Gall-Borrut, P, et al. "Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy." Journal of microscopy vol. 202 (2001): 34-8. doi: https://doi.org/10.1046/j.1365-2818.2001.00802.x
Gall-Borrut P, Belier B, Falgayrettes P, Castagne M, Bergaud C, Temple-Boyer P. Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy. J Microsc. 2001 Apr;202:34-8. doi: 10.1046/j.1365-2818.2001.00802.x. PMID: 11298866.
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J Microsc. 2001 Apr;202:34-8. doi: 10.1046/j.1365-2818.2001.00802.x.

Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy.

Journal of microscopy

P Gall-Borrut, B Belier, P Falgayrettes, M Castagne, C Bergaud, P Temple-Boyer

Affiliations

  1. CEM2, Université Montpellier II, 34095 Montpellier Cedex 5, France. [email protected]

PMID: 11298866 DOI: 10.1046/j.1365-2818.2001.00802.x

Abstract

We developed silicon nitride cantilevers integrating a probe tip and a wave guide that is prolonged on the silicon holder with one or two guides. A micro-system is bonded to a photodetector. The resulting hybrid system enables us to obtain simultaneously topographic and optical near-field images. Examples of images obtained on a longitudinal cross-section of an optical fibre are shown.

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