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IEEE Trans Ultrason Ferroelectr Freq Control. 2001 Nov;48(6):1517-26. doi: 10.1109/58.971702.

Acoustic loss mechanisms in leaky SAW resonators on lithium tantalate.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

J Koskela, J V Knuuttila, T Makkonen, V P Plessky, M M Salomaa

Affiliations

  1. Materials Physics Laboratory, Helsinki University of Technology (Technical Physics), Finland. [email protected]

PMID: 11800113 DOI: 10.1109/58.971702

Abstract

We discuss acoustic losses in synchronous leaky surface acoustic wave (LSAW) resonators on rotated Y-cut lithium tantalate (LiTaO3) substrates. Laser probe measurements and theoretical models are employed to identify and characterize the radiation of leaky waves into the busbars of the resonator and the excitation of bulk acoustic waves. Escaping LSAWs lead to a significant increase in the conductance, typically occurring in the vicinity of the resonance and in the stopband, but they do not explain the experimentally observed deterioration of the electrical response at the antiresonance. At frequencies above the stop-band, the generation of fast shear bulk acoustic waves is the dominant loss mechanism.

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