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Zier M, Oswald S, Reiche R, et al. XPS investigations of thin tantalum films on a silicon surface. Anal Bioanal Chem. 2003;375(7):902-5doi: 10.1007/s00216-003-1788-2.
Zier, M., Oswald, S., Reiche, R., & Wetzig, K. (2003). XPS investigations of thin tantalum films on a silicon surface. Analytical and bioanalytical chemistry, 375(7), 902-5. https://doi.org/10.1007/s00216-003-1788-2
Zier, M, et al. "XPS investigations of thin tantalum films on a silicon surface." Analytical and bioanalytical chemistry vol. 375,7 (2003): 902-5. doi: https://doi.org/10.1007/s00216-003-1788-2
Zier M, Oswald S, Reiche R, Wetzig K. XPS investigations of thin tantalum films on a silicon surface. Anal Bioanal Chem. 2003 Apr;375(7):902-5. doi: 10.1007/s00216-003-1788-2. Epub 2003 Mar 15. PMID: 12707758.
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