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Batson PE. Aberration correction results in the IBM STEM instrument. Ultramicroscopy. 2003;96(3):239-49doi: 10.1016/S0304-3991(03)00091-3.
Batson, P. E. (2003). Aberration correction results in the IBM STEM instrument. Ultramicroscopy, 96(3), 239-49. https://doi.org/10.1016/S0304-3991(03)00091-3
Batson, P E. "Aberration correction results in the IBM STEM instrument." Ultramicroscopy vol. 96,3 (2003): 239-49. doi: https://doi.org/10.1016/S0304-3991(03)00091-3
Batson PE. Aberration correction results in the IBM STEM instrument. Ultramicroscopy. 2003 Sep;96(3):239-49. doi: 10.1016/S0304-3991(03)00091-3. PMID: 12871792.
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Ultramicroscopy. 2003 Sep;96(3):239-49. doi: 10.1016/S0304-3991(03)00091-3.

Aberration correction results in the IBM STEM instrument.

Ultramicroscopy

P E Batson

Affiliations

  1. IBM Research, Yorktown Heights, NY 10598, USA. [email protected]

PMID: 12871792 DOI: 10.1016/S0304-3991(03)00091-3

Abstract

Results from the installation of aberration correction in the IBM 120 kV STEM argue that a sub-angstrom probe size has been achieved. Results and the experimental methods used to obtain them are described here. Some post-experiment processing is necessary to demonstrate the probe size of about 0.078 nm. While the promise of aberration correction is demonstrated, we remain at the very threshold of practicality, given the very stringent stability requirements.

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