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Decker JE, Miles JR, Madej AA, et al. Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry--application to absolute long gauge block measurement. Appl Opt. 2003;42(28):5670-8doi: 10.1364/ao.42.005670.
Decker, J. E., Miles, J. R., Madej, A. A., Siemsen, R. F., Siemsen, K. J., de Bonth, S., Bustraan, K., Temple, S., & Pekelsky, J. R. (2003). Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry--application to absolute long gauge block measurement. Applied optics, 42(28), 5670-8. https://doi.org/10.1364/ao.42.005670
Decker, Jennifer E, et al. "Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry--application to absolute long gauge block measurement." Applied optics vol. 42,28 (2003): 5670-8. doi: https://doi.org/10.1364/ao.42.005670
Decker JE, Miles JR, Madej AA, Siemsen RF, Siemsen KJ, de Bonth S, Bustraan K, Temple S, Pekelsky JR. Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry--application to absolute long gauge block measurement. Appl Opt. 2003 Oct 01;42(28):5670-8. doi: 10.1364/ao.42.005670. PMID: 14528928.
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Appl Opt. 2003 Oct 01;42(28):5670-8. doi: 10.1364/ao.42.005670.

Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry--application to absolute long gauge block measurement.

Applied optics

Jennifer E Decker, John R Miles, Alan A Madej, Ralph F Siemsen, Klaus J Siemsen, Sebastian de Bonth, Krijn Bustraan, Sara Temple, James R Pekelsky

Affiliations

  1. Institute for National Measurement Standards, National Research Council of Canada, Ottawa, Ontario K1A 0R6, Canada.

PMID: 14528928 DOI: 10.1364/ao.42.005670

Abstract

An instrument for step-height measurement by multiple-wavelength interferometry is described. The addition of a 1152-nm wavelength to a multiple-wavelength scheme applying wavelengths of 633, 612, and 543 nm relaxes the tolerance range of the required preliminary measurement to +/- 140 microm, if the total uncertainty in the fringe fraction measurement can be kept below 2%. For larger fringe fraction measurement uncertainty, numerical simulations show that the integer number of interference orders can still be determined unambiguously if the range in the preliminary knowledge of the length has been correspondingly reduced. The interferometer instrument is described, and experimental data are presented in the context of long gauge block calibration at the National Research Council of Canada.

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