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Kubat F, Ruile W, Hesjedal T, et al. Calculation and experimental verification of the acoustic stress at GHZ frequencies in SAW resonators. IEEE Trans Ultrason Ferroelectr Freq Control. 2004;51(11):1437-48doi: 10.1109/tuffc.2004.1367484.
Kubat, F., Ruile, W., Hesjedal, T., Stotz, J., Rösler, U., & Reindl, L. M. (2004). Calculation and experimental verification of the acoustic stress at GHZ frequencies in SAW resonators. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 51(11), 1437-48. https://doi.org/10.1109/tuffc.2004.1367484
Kubat, Franz, et al. "Calculation and experimental verification of the acoustic stress at GHZ frequencies in SAW resonators." IEEE transactions on ultrasonics, ferroelectrics, and frequency control vol. 51,11 (2004): 1437-48. doi: https://doi.org/10.1109/tuffc.2004.1367484
Kubat F, Ruile W, Hesjedal T, Stotz J, Rösler U, Reindl LM. Calculation and experimental verification of the acoustic stress at GHZ frequencies in SAW resonators. IEEE Trans Ultrason Ferroelectr Freq Control. 2004 Nov;51(11):1437-48. doi: 10.1109/tuffc.2004.1367484. PMID: 15600088.
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IEEE Trans Ultrason Ferroelectr Freq Control. 2004 Nov;51(11):1437-48. doi: 10.1109/tuffc.2004.1367484.

Calculation and experimental verification of the acoustic stress at GHZ frequencies in SAW resonators.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

Franz Kubat, Werner Ruile, Thorsten Hesjedal, James Stotz, Ulrike Rösler, Leonhard M Reindl

Affiliations

  1. EPCOS AG, Munich, Germany. [email protected]

PMID: 15600088 DOI: 10.1109/tuffc.2004.1367484

Abstract

High power applications of Surface Acoustic Wave (SAW) devices may lead to acoustomigration in their thin metal electrodes, which deteriorates the performance or may even destroy the SAW device. It is confirmed in this paper that the mechanism of acoustomigration is caused by the SAW-induced stress in the metal. The quantitative calculation of this stress will be shown in detail, starting from the widely used P-Matrix model as a standard analysis tool. The combination with the partial wave method (PWM) yields the stress distribution inside the metal. This approach provides the flexibility to determine the stresses for any given point in a SAW device, for any input power, frequency, wavetype, device geometry, or metal layer. In order to confirm the absolute values of the stress components, we calculated and measured displacements as a function of input power and frequency.

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