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Pristinski D, Kozlovskaya V, Sukhishvili SA. Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry. J Opt Soc Am A Opt Image Sci Vis. 2006;23(10):2639-44doi: 10.1364/josaa.23.002639.
Pristinski, D., Kozlovskaya, V., & Sukhishvili, S. A. (2006). Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry. Journal of the Optical Society of America. A, Optics, image science, and vision, 23(10), 2639-44. https://doi.org/10.1364/josaa.23.002639
Pristinski, Denis, et al. "Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry." Journal of the Optical Society of America. A, Optics, image science, and vision vol. 23,10 (2006): 2639-44. doi: https://doi.org/10.1364/josaa.23.002639
Pristinski D, Kozlovskaya V, Sukhishvili SA. Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry. J Opt Soc Am A Opt Image Sci Vis. 2006 Oct;23(10):2639-44. doi: 10.1364/josaa.23.002639. PMID: 16985548.
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J Opt Soc Am A Opt Image Sci Vis. 2006 Oct;23(10):2639-44. doi: 10.1364/josaa.23.002639.

Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry.

Journal of the Optical Society of America. A, Optics, image science, and vision

Denis Pristinski, Veronika Kozlovskaya, Svetlana A Sukhishvili

Affiliations

  1. Department of Chemistry and Chemical Biology, Stevens Institute of Technology, Hoboken, New Jersey 07030, USA. [email protected]

PMID: 16985548 DOI: 10.1364/josaa.23.002639

Abstract

Ellipsometry is often used to determine the refractive index and/or the thickness of a polymer layer on a substrate. However, simultaneous determination of these parameters from a single-wavelength single-angle measurement is not always possible. The present study determines the sensitivity of the method to errors of measurement for the case of phase modulated ellipsometry and identifies conditions for decoupling film thickness and refractive index. For a specific range of film thickness, both the thickness and the refractive index can be determined from a single measurement with high precision. This optimal range of the film thickness is determined for organic thin films, and the analysis is tested on hydrogel-like polymer films in air and in water.

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