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Merano M, Boyer G, Trisorio A, et al. Superresolved femtosecond laser ablation. Opt Lett. 2007;32(15):2239-41doi: 10.1364/ol.32.002239.
Merano, M., Boyer, G., Trisorio, A., Chériaux, G., & Mourou, G. (2007). Superresolved femtosecond laser ablation. Optics letters, 32(15), 2239-41. https://doi.org/10.1364/ol.32.002239
Merano, Michele, et al. "Superresolved femtosecond laser ablation." Optics letters vol. 32,15 (2007): 2239-41. doi: https://doi.org/10.1364/ol.32.002239
Merano M, Boyer G, Trisorio A, Chériaux G, Mourou G. Superresolved femtosecond laser ablation. Opt Lett. 2007 Aug 01;32(15):2239-41. doi: 10.1364/ol.32.002239. PMID: 17671596.
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Opt Lett. 2007 Aug 01;32(15):2239-41. doi: 10.1364/ol.32.002239.

Superresolved femtosecond laser ablation.

Optics letters

Michele Merano, Gilbert Boyer, Alexandre Trisorio, Gilles Chériaux, Gérard Mourou

Affiliations

  1. Laboratoire d'Optique Applique, ENSTA - Ecole Polytechnique, Chemin de la Hunière 91761 Palaiseau, France. [email protected]

PMID: 17671596 DOI: 10.1364/ol.32.002239

Abstract

The determinist behavior of the femtosecond ablation process allows morphing features well under the diffraction limit by utilizing the thresholding effect, down to the nanometer scale. Because there are a vast range of applications where scaling down the size of the features is a major concern, we investigate the use of superresolving pupil plane filters. As is well known, these filters redistribute the focused optical intensity for a narrower bright spot and, as a trade-off, increase the sidelobes. However, this drawback can be rendered insignificant if all the outer optical power is kept under the determinist threshold value. Two types of pure absorbing binary filter have been tried, giving credence to a size reduction of the ablations in fused silica.

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