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Rev Sci Instrum. 2009 Feb;80(2):023901. doi: 10.1063/1.3077153.

Experimental setup and realization of thin film specimens for microtensile tests.

The Review of scientific instruments

Christophe Malhaire, CĂ©dric Seguineau, Michel Ignat, Charles Josserond, Laurent Debove, Sebastiano Brida, Jean-Michel Desmarres, Xavier Lafontan

Affiliations

  1. UniversitĂ© de Lyon, INSA-Lyon, INL, CNRS UMR 5270, Villeurbanne F-69621, France. [email protected]

PMID: 19256656 DOI: 10.1063/1.3077153

Abstract

This paper describes a microtensile test system and the design as the realization of the samples dedicated to the tensile experiments. Two different technologies for the development of miniaturized specimens are detailed: self-standing tensile samples sustained by silicon frames and metal on polymer specimens obtained by laser cutting. The design of the samples has been optimized by means of finite element simulations. Aluminum beams with very large length on thickness ratio have been released from their silicon substrate using a standard etching process. Stress/strain curves are derived from experimental force/displacement values and discussed in terms of Young's modulus values and critical parameters (flow and rupture stresses).

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