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Kodate K, Takenaka H, Kamiya T. Fabrication of high numerical aperture zone plates using deep ultraviolet lithography. Appl Opt. 1984;23(3):504doi: 10.1364/ao.23.000504.
Kodate, K., Takenaka, H., & Kamiya, T. (1984). Fabrication of high numerical aperture zone plates using deep ultraviolet lithography. Applied optics, 23(3), 504. https://doi.org/10.1364/ao.23.000504
Kodate, K, et al. "Fabrication of high numerical aperture zone plates using deep ultraviolet lithography." Applied optics vol. 23,3 (1984): 504. doi: https://doi.org/10.1364/ao.23.000504
Kodate K, Takenaka H, Kamiya T. Fabrication of high numerical aperture zone plates using deep ultraviolet lithography. Appl Opt. 1984 Feb 01;23(3):504. doi: 10.1364/ao.23.000504. PMID: 18204590.
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Appl Opt. 1984 Feb 01;23(3):504. doi: 10.1364/ao.23.000504.

Fabrication of high numerical aperture zone plates using deep ultraviolet lithography.

Applied optics

K Kodate, H Takenaka, T Kamiya

PMID: 18204590 DOI: 10.1364/ao.23.000504

[No abstract available.]

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