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Dirckx JJ, Decraemer WF. Coating techniques in optical interferometric metrology. Appl Opt. 1997;36(13):2776-82doi: 10.1364/ao.36.002776.
Dirckx, J. J., & Decraemer, W. F. (1997). Coating techniques in optical interferometric metrology. Applied optics, 36(13), 2776-82. https://doi.org/10.1364/ao.36.002776
Dirckx, J J, and Decraemer, W F. "Coating techniques in optical interferometric metrology." Applied optics vol. 36,13 (1997): 2776-82. doi: https://doi.org/10.1364/ao.36.002776
Dirckx JJ, Decraemer WF. Coating techniques in optical interferometric metrology. Appl Opt. 1997 May 01;36(13):2776-82. doi: 10.1364/ao.36.002776. PMID: 18253269.
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Appl Opt. 1997 May 01;36(13):2776-82. doi: 10.1364/ao.36.002776.

Coating techniques in optical interferometric metrology.

Applied optics

J J Dirckx, W F Decraemer

PMID: 18253269 DOI: 10.1364/ao.36.002776

Abstract

In optical interferometry diffuse reflectivity of the surface under study should be high and homogeneous. Application of a white reflective coating can strongly improve measurement results. The optical properties of bronze powder, TiO(2) powder, white Chinese ink, and MgO coatings are discussed. Measurements of reflected intensity distribution show that white Chinese ink and MgO have superior optical characteristics, and electron microscopy shows that these coatings cause thickness artifacts of less than 7.5 and 17 mum, respectively. The effect on deformation measurements is demonstrated by moiré topography on a thin membrane that is deformed under small static pressures. The membrane center displacement varies from 15 to 100 mum, and within a measuring precision of 2.5 mum no artifacts on this deformation are found.

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