Cite
Doll JC, Petzold BC, Ninan B, et al. Aluminum nitride on titanium for CMOS compatible piezoelectric transducers. J Micromech Microeng. 2010;20(2):25008doi: 10.1088/0960-1317/20/2/025008.
Doll, J. C., Petzold, B. C., Ninan, B., Mullapudi, R., & Pruitt, B. L. (2010). Aluminum nitride on titanium for CMOS compatible piezoelectric transducers. Journal of micromechanics and microengineering : structures, devices, and systems, 20(2), 25008. https://doi.org/10.1088/0960-1317/20/2/025008
Doll, Joseph C, et al. "Aluminum nitride on titanium for CMOS compatible piezoelectric transducers." Journal of micromechanics and microengineering : structures, devices, and systems vol. 20,2 (2010): 25008. doi: https://doi.org/10.1088/0960-1317/20/2/025008
Doll JC, Petzold BC, Ninan B, Mullapudi R, Pruitt BL. Aluminum nitride on titanium for CMOS compatible piezoelectric transducers. J Micromech Microeng. 2010;20(2):25008. doi: 10.1088/0960-1317/20/2/025008. PMID: 20333316; PMCID: PMC2843000.
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