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Lunt EJ, Wu B, Keeley JM, et al. Hollow ARROW Waveguides on Self-Aligned Pedestals for Improved Geometry and Transmission. IEEE Photonics Technol Lett. 2010;22(15):1147-1149doi: 10.1109/LPT.2010.2051145.
Lunt, E. J., Wu, B., Keeley, J. M., Measor, P., Schmidt, H., & Hawkins, A. R. (2010). Hollow ARROW Waveguides on Self-Aligned Pedestals for Improved Geometry and Transmission. IEEE photonics technology letters : a publication of the IEEE Laser and Electro-optics Society, 22(15), 1147-1149. https://doi.org/10.1109/LPT.2010.2051145
Lunt, Evan J, et al. "Hollow ARROW Waveguides on Self-Aligned Pedestals for Improved Geometry and Transmission." IEEE photonics technology letters : a publication of the IEEE Laser and Electro-optics Society vol. 22,15 (2010): 1147-1149. doi: https://doi.org/10.1109/LPT.2010.2051145
Lunt EJ, Wu B, Keeley JM, Measor P, Schmidt H, Hawkins AR. Hollow ARROW Waveguides on Self-Aligned Pedestals for Improved Geometry and Transmission. IEEE Photonics Technol Lett. 2010 Jul 12;22(15):1147-1149. doi: 10.1109/LPT.2010.2051145. PMID: 21423839; PMCID: PMC3059265.
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IEEE Photonics Technol Lett. 2010 Jul 12;22(15):1147-1149. doi: 10.1109/LPT.2010.2051145.

Hollow ARROW Waveguides on Self-Aligned Pedestals for Improved Geometry and Transmission.

IEEE photonics technology letters : a publication of the IEEE Laser and Electro-optics Society

Evan J Lunt, Bin Wu, Jared M Keeley, Philip Measor, Holger Schmidt, Aaron R Hawkins

Affiliations

  1. Department of Electrical and Computer Engineering, Brigham Young University, Provo, UT 84602 USA.

PMID: 21423839 PMCID: PMC3059265 DOI: 10.1109/LPT.2010.2051145

Abstract

Micrometer-sized hollow antiresonant reflecting optical waveguides on silicon substrates have been previously demonstrated with liquid and gas-filled cores. Previous designs have nonideal geometries, with nonuniform lateral layers around the hollow core, resulting in higher loss than could potentially be achieved. A new design and fabrication process has been developed involving hollow waveguide fabrication on a self-aligned pedestal (SAP) using anisotropic plasma etching. With the SAP structure, the hollow core is surrounded by uniform layers and a terminal layer of air on three sides, resulting in air-core waveguide loss of 1.54 cm(-1) at 785 nm and high fabrication yield.

References

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