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Beghi MG, Di Fonzo F, Pietralunga S, et al. Precision and accuracy in film stiffness measurement by Brillouin spectroscopy. Rev Sci Instrum. 2011;82(5):053107doi: 10.1063/1.3585980.
Beghi, M. G., Di Fonzo, F., Pietralunga, S., Ubaldi, C., & Bottani, C. E. (2011). Precision and accuracy in film stiffness measurement by Brillouin spectroscopy. The Review of scientific instruments, 82(5), 053107. https://doi.org/10.1063/1.3585980
Beghi, M G, et al. "Precision and accuracy in film stiffness measurement by Brillouin spectroscopy." The Review of scientific instruments vol. 82,5 (2011): 053107. doi: https://doi.org/10.1063/1.3585980
Beghi MG, Di Fonzo F, Pietralunga S, Ubaldi C, Bottani CE. Precision and accuracy in film stiffness measurement by Brillouin spectroscopy. Rev Sci Instrum. 2011 May;82(5):053107. doi: 10.1063/1.3585980. PMID: 21639492.
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Rev Sci Instrum. 2011 May;82(5):053107. doi: 10.1063/1.3585980.

Precision and accuracy in film stiffness measurement by Brillouin spectroscopy.

The Review of scientific instruments

M G Beghi, F Di Fonzo, S Pietralunga, C Ubaldi, C E Bottani

Affiliations

  1. Energy Department and NEMAS Center, Politecnico di Milano, Via Ponzio 34?3, 20133 Milano, Italy.

PMID: 21639492 DOI: 10.1063/1.3585980

Abstract

The interest in the measurement of the elastic properties of thin films is witnessed by a number of new techniques being proposed. However, the precision of results is seldom assessed in detail. Brillouin spectroscopy (BS) is an established optical, contactless, non-destructive technique, which provides a full elastic characterization of bulk materials and thin films. In the present work, the whole process of measurement of the elastic moduli by BS is critically analyzed: experimental setup, data recording, calibration, and calculation of the elastic moduli. It is shown that combining BS with ellipsometry a fully optical characterization can be obtained. The key factors affecting uncertainty of the results are identified and discussed. A procedure is proposed to discriminate factors affecting the precision from those affecting the accuracy. By the characterization of a model transparent material, silica in bulk and film form, it is demonstrated that both precision and accuracy of the elastic moduli measured by BS can reach 1% range, qualifying BS as a reference technique.

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