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Krijnen GJ, Dijkstra M, van Baar JJ, et al. MEMS based hair flow-sensors as model systems for acoustic perception studies. Nanotechnology. 2006;17(4):S84-9doi: 10.1088/0957-4484/17/4/013.
Krijnen, G. J., Dijkstra, M., van Baar, J. J., Shankar, S. S., Kuipers, W. J., de Boer, R. J., Altpeter, D., Lammerink, T. S., & Wiegerink, R. (2006). MEMS based hair flow-sensors as model systems for acoustic perception studies. Nanotechnology, 17(4), S84-9. https://doi.org/10.1088/0957-4484/17/4/013
Krijnen, Gijs J M, et al. "MEMS based hair flow-sensors as model systems for acoustic perception studies." Nanotechnology vol. 17,4 (2006): S84-9. doi: https://doi.org/10.1088/0957-4484/17/4/013
Krijnen GJ, Dijkstra M, van Baar JJ, Shankar SS, Kuipers WJ, de Boer RJ, Altpeter D, Lammerink TS, Wiegerink R. MEMS based hair flow-sensors as model systems for acoustic perception studies. Nanotechnology. 2006 Feb 28;17(4):S84-9. doi: 10.1088/0957-4484/17/4/013. Epub 2006 Jan 25. PMID: 21727359.
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Nanotechnology. 2006 Feb 28;17(4):S84-9. doi: 10.1088/0957-4484/17/4/013. Epub 2006 Jan 25.

MEMS based hair flow-sensors as model systems for acoustic perception studies.

Nanotechnology

Gijs J M Krijnen, Marcel Dijkstra, John J van Baar, Siripurapu S Shankar, Winfred J Kuipers, Rik J H de Boer, Dominique Altpeter, Theo S J Lammerink, Remco Wiegerink

Affiliations

  1. Transducers Science and Technology group, MESA+ Research Institute, University of Twente, PO Box 217, 7500AE, Enschede, The Netherlands.

PMID: 21727359 DOI: 10.1088/0957-4484/17/4/013

Abstract

Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors, allowing for capacitive read-out. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance).

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