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Rev Sci Instrum. 2012 Oct;83(10):105112. doi: 10.1063/1.4759495.

A portable molecular beam epitaxy system for in situ x-ray investigations at synchrotron beamlines.

The Review of scientific instruments

T Slobodskyy, P Schroth, D Grigoriev, A A Minkevich, D Z Hu, D M Schaadt, T Baumbach

Affiliations

  1. Institute for Synchrotron Radiation, Karlsruhe Institute of Technology-76344 Eggenstein-Leopoldshafen, Germany. [email protected]

PMID: 23126809 DOI: 10.1063/1.4759495

Abstract

A portable synchrotron molecular beam epitaxy (MBE) system is designed and applied for in situ investigations. The growth chamber is equipped with all the standard MBE components such as effusion cells with shutters, main shutter, cooling shroud, manipulator, reflection high energy electron diffraction setup, and pressure gauges. The characteristic feature of the system is the beryllium windows which are used for in situ x-ray measurements. An UHV sample transfer case allows in vacuo transfer of samples prepared elsewhere. We describe the system design and demonstrate its performance by investigating the annealing process of buried InGaAs self-organized quantum dots.

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