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Zamkotsian F, Timotijevic B, Lockhart R, et al. Optical characterization of fully programmable MEMS diffraction gratings. Opt Express. 2012;20(23):25267-74doi: 10.1364/OE.20.025267.
Zamkotsian, F., Timotijevic, B., Lockhart, R., Stanley, R. P., Lanzoni, P., Luetzelschwab, M., Canonica, M., Noell, W., & Tormen, M. (2012). Optical characterization of fully programmable MEMS diffraction gratings. Optics express, 20(23), 25267-74. https://doi.org/10.1364/OE.20.025267
Zamkotsian, F, et al. "Optical characterization of fully programmable MEMS diffraction gratings." Optics express vol. 20,23 (2012): 25267-74. doi: https://doi.org/10.1364/OE.20.025267
Zamkotsian F, Timotijevic B, Lockhart R, Stanley RP, Lanzoni P, Luetzelschwab M, Canonica M, Noell W, Tormen M. Optical characterization of fully programmable MEMS diffraction gratings. Opt Express. 2012 Nov 05;20(23):25267-74. doi: 10.1364/OE.20.025267. PMID: 23187343.
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Opt Express. 2012 Nov 05;20(23):25267-74. doi: 10.1364/OE.20.025267.

Optical characterization of fully programmable MEMS diffraction gratings.

Optics express

F Zamkotsian, B Timotijevic, R Lockhart, R P Stanley, P Lanzoni, M Luetzelschwab, M Canonica, W Noell, M Tormen

Affiliations

  1. Laboratoire d’Astrophysique de Marseille- LAM, Université Aix-Marseille & CNRS, UMR7326, 38 rue Frederic Joliot-Curie, 13388, Marseille Cedex 13, France. [email protected]

PMID: 23187343 DOI: 10.1364/OE.20.025267

Abstract

We have fabricated and characterized fully programmable diffraction gratings consisting of 64 silicon micro-mirrors. The mirrors are 700µm long and 50µm wide with a fill factor of 90%. They are actuated electrostatically and move down by 1.25μm while showing negligible cross-talk and bowing as small as 0.14μm over 700μm. Extinction ratio up to 100 has been achieved by adjusting only 3 adjacent micro-mirrors. The gratings could operate either as light modulators up to 5μm or spectra generators up to 2.5μm.

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