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Pogrebnjak AD, Shpak AP, Beresnev VM, et al. Effect of thermal annealing in vacuum and in air on nanograin sizes in hard and superhard coatings Zr-Ti-Si-N. J Nanosci Nanotechnol. 2012;12(12):9213-9doi: 10.1166/jnn.2012.6777.
Pogrebnjak, A. D., Shpak, A. P., Beresnev, V. M., Kolesnikov, D. A., Kunitskii, Y. A., Sobol, O. V., Uglov, V. V., Komarov, F. F., Shypylenko, A. P., Makhmudov, N. A., Demyanenko, A. A., Baidak, V. S., & Grudnitskii, V. V. (2012). Effect of thermal annealing in vacuum and in air on nanograin sizes in hard and superhard coatings Zr-Ti-Si-N. Journal of nanoscience and nanotechnology, 12(12), 9213-9. https://doi.org/10.1166/jnn.2012.6777
Pogrebnjak, A D, et al. "Effect of thermal annealing in vacuum and in air on nanograin sizes in hard and superhard coatings Zr-Ti-Si-N." Journal of nanoscience and nanotechnology vol. 12,12 (2012): 9213-9. doi: https://doi.org/10.1166/jnn.2012.6777
Pogrebnjak AD, Shpak AP, Beresnev VM, Kolesnikov DA, Kunitskii YA, Sobol OV, Uglov VV, Komarov FF, Shypylenko AP, Makhmudov NA, Demyanenko AA, Baidak VS, Grudnitskii VV. Effect of thermal annealing in vacuum and in air on nanograin sizes in hard and superhard coatings Zr-Ti-Si-N. J Nanosci Nanotechnol. 2012 Dec;12(12):9213-9. doi: 10.1166/jnn.2012.6777. PMID: 23447980.
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J Nanosci Nanotechnol. 2012 Dec;12(12):9213-9. doi: 10.1166/jnn.2012.6777.

Effect of thermal annealing in vacuum and in air on nanograin sizes in hard and superhard coatings Zr-Ti-Si-N.

Journal of nanoscience and nanotechnology

A D Pogrebnjak, A P Shpak, V M Beresnev, D A Kolesnikov, Yu A Kunitskii, O V Sobol, V V Uglov, F F Komarov, A P Shypylenko, N A Makhmudov, A A Demyanenko, V S Baidak, V V Grudnitskii

Affiliations

  1. Sumy State University, St.R-Korsakov 2, 40007 Sumy, Ukraine.

PMID: 23447980 DOI: 10.1166/jnn.2012.6777

Abstract

Zr-Ti-Si-N coating had high thermal stability of phase composition and remained structure state under thermal annealing temperatures reached 1180 degrees C in vacuum and 830 degrees C in air. Effect of isochronous annealing on phase composition, structure, and stress state of Zr-Ti-Si-N-ion-plasma deposited coatings (nanocomposite coatings) was reported. Below 1000 degrees C annealing temperature in vacuum, changing of phase composition is determined by appearing of siliconitride crystallites (beta-Si3N4) with hexagonal crystalline lattice and by formation of ZrO2 oxide crystallites. Formation of the latter did not result in decay of solid solution (Zr, Ti)N but increased in it a specific content of Ti-component. Vacuum annealing increased sizes of solid solution nanocrystallites from (12 to 15) in as-deposited coatings to 25 nm after annealing temperature reached 1180 degrees C. One could also find macro- and microrelaxations, which were accompanied by formation of deformation defects, which values reached 15.5 vol.%. Under 530 degrees C annealing in vacuum or in air, nanocomposite coating hardness increased. When Ti and Si concentration increased and three phases nc-ZrN, (Zr, Ti)N-nc, and alpha-Si3N4 were formed, average hardness increased to 40.8 +/- 4 GPa. Annealing to 500 degrees C increased hardness and demonstrated lower spread in values H = 48 +/- 6 GPa and E = (456 +/- 78) GPa. Zr-Ti-Si-N coatings has high wear resistance and low friction coefficient in comparison at a temperature of 500 degrees C possess with coatings TiN, Ti-Si-N.

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