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Brückner JB, Le Rouzo J, Escoubas L, et al. Flat-top and patterned-topped cone gratings for visible and mid-infrared antireflective properties. Opt Express. 2013;21(13):16043-55doi: 10.1364/OE.21.016043.
Brückner, J. B., Le Rouzo, J., Escoubas, L., Berginc, G., Gourgon, C., Desplats, O., & Simon, J. J. (2013). Flat-top and patterned-topped cone gratings for visible and mid-infrared antireflective properties. Optics express, 21(13), 16043-55. https://doi.org/10.1364/OE.21.016043
Brückner, Jean-Baptiste, et al. "Flat-top and patterned-topped cone gratings for visible and mid-infrared antireflective properties." Optics express vol. 21,13 (2013): 16043-55. doi: https://doi.org/10.1364/OE.21.016043
Brückner JB, Le Rouzo J, Escoubas L, Berginc G, Gourgon C, Desplats O, Simon JJ. Flat-top and patterned-topped cone gratings for visible and mid-infrared antireflective properties. Opt Express. 2013 Jul 01;21(13):16043-55. doi: 10.1364/OE.21.016043. PMID: 23842391.
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Opt Express. 2013 Jul 01;21(13):16043-55. doi: 10.1364/OE.21.016043.

Flat-top and patterned-topped cone gratings for visible and mid-infrared antireflective properties.

Optics express

Jean-Baptiste Brückner, Judikaël Le Rouzo, Ludovic Escoubas, Gérard Berginc, Cécile Gourgon, Olivier Desplats, Jean-Jacques Simon

Affiliations

  1. Aix-Marseille Université, Institut Matériaux Microélectronique Nanosciences de Provence - IM2NP, CNRS-UMR 6242, Domaine Universitaire de Saint-Jérôme, Service 231, 13397 Marseille Cedex20, France. [email protected]

PMID: 23842391 DOI: 10.1364/OE.21.016043

Abstract

Achieving a broadband antireflection property from material surfaces is one of the highest priorities for those who want to improve the efficiency of solar cells or the sensitivity of photo-detectors. To lower the reflectance of a surface, we are concerned with the study of the optical response of flat-top and patterned-topped cone shaped silicon gratings, based on previous work exploring pyramid gratings. Through rigorous numerical methods such as Finite Different Time Domain, we first designed several flat-top structures that theoretically demonstrate an antireflective character within the middle infrared region. From the opto-geometrical parameters such as period, depth and shape of the pattern determined by numerical analysis, these structures have been fabricated using controlled slope plasma etching processes. In order to extend the antireflective properties up to the visible wavelengths, patterned-topped cones have been fabricated as well. Afterwards, optical characterizations of several samples were carried out. Thus, the performances of the flat-top and patterned-topped cones have been compared in the visible and mid infrared range.

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