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Bach SB, Parent DC. Ion-molecule reactions in mixtures of trimethylaluminum and methylamines. J Am Soc Mass Spectrom. 1993;4(2):111-6doi: 10.1016/1044-0305(93)85066-7.
Bach, S. B., & Parent, D. C. (1993). Ion-molecule reactions in mixtures of trimethylaluminum and methylamines. Journal of the American Society for Mass Spectrometry, 4(2), 111-6. https://doi.org/10.1016/1044-0305(93)85066-7
Bach, S B, and Parent, D C. "Ion-molecule reactions in mixtures of trimethylaluminum and methylamines." Journal of the American Society for Mass Spectrometry vol. 4,2 (1993): 111-6. doi: https://doi.org/10.1016/1044-0305(93)85066-7
Bach SB, Parent DC. Ion-molecule reactions in mixtures of trimethylaluminum and methylamines. J Am Soc Mass Spectrom. 1993 Feb;4(2):111-6. doi: 10.1016/1044-0305(93)85066-7. PMID: 24234789.
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J Am Soc Mass Spectrom. 1993 Feb;4(2):111-6. doi: 10.1016/1044-0305(93)85066-7.

Ion-molecule reactions in mixtures of trimethylaluminum and methylamines.

Journal of the American Society for Mass Spectrometry

S B Bach, D C Parent

Affiliations

  1. Chemistry Division/Code 6110, Naval Research Laboratory, 20375-5000, Washington, D.C., USA.

PMID: 24234789 DOI: 10.1016/1044-0305(93)85066-7

Abstract

The ion-molecule reactions of mixtures of trimethylaluminum and methylamines, to serve as a model system for group 13-15 semiconductor fabrication, were examined by using Fourier transform ion cyclotron resonance mass spectrometry. Sequential ion-molecule reactions leading to formation of multiple adduets were observed for each of the reactant mixtures investigated. Collision-induced dissociation was used to probe the adduct structures. There is evidence for hydrogen bonding between the amines and aluminum in most of the adducts studied. Rearrangement of the aluminum/nitrogen skeletons was not observed, although the aluminum/nitrogen bonds appear to be relatively strong, so that stable adducts can be formed. The monomethylamine and dimethylamine readily produce gas-phase neutral adducts with trimethylaluminum, which can be related to the basicities of the methylamines.

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