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Phys Chem Chem Phys. 2014 Jan 21;16(3):1050-9. doi: 10.1039/c3cp53023j. Epub 2013 Nov 28.

Low-energy electron induced resonant loss of aromaticity: consequences on cross-linking in terphenylthiol SAMs.

Physical chemistry chemical physics : PCCP

L Amiaud, J Houplin, M Bourdier, V Humblot, R Azria, C-M Pradier, A Lafosse

Affiliations

  1. Univ. Paris-Sud, Institut des Sciences Moléculaires d'Orsay (ISMO), UMR 8214, Orsay, F-91405, France. [email protected].

PMID: 24287704 DOI: 10.1039/c3cp53023j

Abstract

Aromatic self-assembled monolayers (SAMs) can be used as negative tone electron resists in functional surface lithographic fabrication. A dense and resistant molecular network is obtained under electron irradiation through the formation of a cross-linked network. The elementary processes and possible mechanisms involved were investigated through the response of a model aromatic SAM, p-terphenylthiol SAM, to low-energy electron (0-10 eV) irradiation. Energy loss spectra as well as vibrational excitation functions were measured using High Resolution Electron Energy Loss Spectroscopy (HREELS). A resonant electron attachment process was identified around 6 eV through associated enhanced excitation probability of the CH stretching modes ν(CH)(ph) at 378 meV. Electron irradiation at 6 eV was observed to induce a peak around 367 meV in the energy loss spectra, attributed to the formation of sp(3)-hybridized CHx groups within the SAM. This partial loss of aromaticity is interpreted to be the result of resonance formation, which relaxes by reorganization and/or CH bond dissociation mechanisms followed by radical chain reactions. These processes may also account for cross-linking induced by electron irradiation of aromatic SAMs in general.

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