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J Nanosci Nanotechnol. 2013 Dec;13(12):7891-4. doi: 10.1166/jnn.2013.8149.

Enhanced performance of flexible nanocrystalline silicon thin-film solar cells using seed layers with high hydrogen dilution.

Journal of nanoscience and nanotechnology

Ji-Eun Lee, Donghwan Kim, Kyung Hoon Yoon, Jun-Sik Cho

Affiliations

  1. Solar Energy Department, Korea Institute of Energy Research, 152 Gajeong-ro, Yuseong-gu, Daejeon 305-343, Korea.

PMID: 24266159 DOI: 10.1166/jnn.2013.8149

Abstract

Flexible hydrogenated nanocrystalline (nc-Si:H) thin-film solar cells were prepared by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD), and the effect of highly crystalline intrinsic Si seed layers at the initial growth stage of i nc-Si:H absorbers on their structural and electrical properties and on the performance of solar cells was investigated. The crystallization of i nc-Si:H absorbers was significantly enforced by the introduction of highly crystalline seed layers, resulting in the reduction of defect-dense a-Si:H grain boundary and incubation layer thickness. The open circuit voltage of the nc-Si:H solar cells with the seed layers was improved by the decrease of charged defect density in the defect-rich amorphous region.

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