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Liu X, Suk JW, Boddeti NG, et al. Large arrays and properties of 3-terminal graphene nanoelectromechanical switches. Adv Mater. 2013;26(10):1571-6doi: 10.1002/adma.201304949.
Liu, X., Suk, J. W., Boddeti, N. G., Cantley, L., Wang, L., Gray, J. M., Hall, H. J., Bright, V. M., Rogers, C. T., Dunn, M. L., Ruoff, R. S., & Bunch, J. S. (2014). Large arrays and properties of 3-terminal graphene nanoelectromechanical switches. Advanced materials (Deerfield Beach, Fla.), 26(10), 1571-6. https://doi.org/10.1002/adma.201304949
Liu, Xinghui, et al. "Large arrays and properties of 3-terminal graphene nanoelectromechanical switches." Advanced materials (Deerfield Beach, Fla.) vol. 26,10 (2014): 1571-6. doi: https://doi.org/10.1002/adma.201304949
Liu X, Suk JW, Boddeti NG, Cantley L, Wang L, Gray JM, Hall HJ, Bright VM, Rogers CT, Dunn ML, Ruoff RS, Bunch JS. Large arrays and properties of 3-terminal graphene nanoelectromechanical switches. Adv Mater. 2014 Mar 12;26(10):1571-6. doi: 10.1002/adma.201304949. Epub 2013 Dec 12. PMID: 24339026.
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Adv Mater. 2014 Mar 12;26(10):1571-6. doi: 10.1002/adma.201304949. Epub 2013 Dec 12.

Large arrays and properties of 3-terminal graphene nanoelectromechanical switches.

Advanced materials (Deerfield Beach, Fla.)

Xinghui Liu, Ji Won Suk, Narasimha G Boddeti, Lauren Cantley, Luda Wang, Jason M Gray, Harris J Hall, Victor M Bright, Charles T Rogers, Martin L Dunn, Rodney S Ruoff, J Scott Bunch

Affiliations

  1. Department of Mechanical Engineering, University of Colorado, Boulder, CO, 80309, USA.

PMID: 24339026 DOI: 10.1002/adma.201304949

Abstract

Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.

© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Keywords: finite element analysis; graphene; microsystems; nanoelectromechanical systems; nanomechanical switches

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