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Micron. 2014 Apr;59:1-7. doi: 10.1016/j.micron.2013.12.002. Epub 2013 Dec 18.

Surface topographic study of chalcogenide thin films of GexSb(As)₄₀-xS₅₀Te₁₀ glasses.

Micron (Oxford, England : 1993)

M Anastasescu, M Gartner, A Szekeres, V Pamukchieva

Affiliations

  1. Institute of Physical Chemistry, Romanian Academy of Sciences, Spl. Independentei 202, 060021 Bucharest, Romania. Electronic address: [email protected].
  2. Institute of Physical Chemistry, Romanian Academy of Sciences, Spl. Independentei 202, 060021 Bucharest, Romania.
  3. Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, 1784 Sofia, Bulgaria.

PMID: 24530358 DOI: 10.1016/j.micron.2013.12.002

Abstract

The surface topography and fractal properties of GexSb(As)40-xS50Te10 (x=10, 20, 27 at.%) films, evaporated onto glass substrates, have been studied by atomic force microscopic imaging at different scales. The surface of the chalcogenide films is smooth (<5 nm roughness), isotropic and having some particular differences in texture. All films are self-similar with Mean Fractal Dimension in the range of 2.25-2.63. The films with GexSb40-xS50Te10 composition are more uniform in terms of surface morphology (grains structure) than those with GexAs40-xS50Te10 composition for which the film surface exhibits a superimposed structure of large particles at x=10 and 20 at.%.

Copyright © 2013 Elsevier Ltd. All rights reserved.

Keywords: Atomic force microscopy; Chalcogenide thin films; Fractal analysis; Surface topography

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