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Vorobiev A, Gevorgian S. Impact of the electrode material and shape on performance of intrinsically tunable ferroelectric FBARs. IEEE Trans Ultrason Ferroelectr Freq Control. 2014;61(5):840-8doi: 10.1109/TUFFC.2014.6805697.
Vorobiev, A., & Gevorgian, S. (2014). Impact of the electrode material and shape on performance of intrinsically tunable ferroelectric FBARs. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 61(5), 840-8. https://doi.org/10.1109/TUFFC.2014.6805697
Vorobiev, Andrei, and Gevorgian, Spartak. "Impact of the electrode material and shape on performance of intrinsically tunable ferroelectric FBARs." IEEE transactions on ultrasonics, ferroelectrics, and frequency control vol. 61,5 (2014): 840-8. doi: https://doi.org/10.1109/TUFFC.2014.6805697
Vorobiev A, Gevorgian S. Impact of the electrode material and shape on performance of intrinsically tunable ferroelectric FBARs. IEEE Trans Ultrason Ferroelectr Freq Control. 2014 May;61(5):840-8. doi: 10.1109/TUFFC.2014.6805697. PMID: 24800981.
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IEEE Trans Ultrason Ferroelectr Freq Control. 2014 May;61(5):840-8. doi: 10.1109/TUFFC.2014.6805697.

Impact of the electrode material and shape on performance of intrinsically tunable ferroelectric FBARs.

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

Andrei Vorobiev, Spartak Gevorgian

PMID: 24800981 DOI: 10.1109/TUFFC.2014.6805697

Abstract

Experiment-based analysis of losses in tunable ferroelectric xBiFeO3-(1-x)BaTiO3 (BF-BT) film bulk acoustic wave resonators (FBARs) is reported. The Q-factors, effective coupling coefficients, and tunabilities are considered as functions of surface roughness of the ferroelectric film, the acoustic impedance and shape of the electrodes/interconnecting strips, leakage of acoustic waves into the substrate via Bragg reflector, and the relative thicknesses of the electrodes and ferroelectric film. Compared with Al, the high acoustic impedance of Pt electrodes provides higher Q-factor, coupling coefficient, and tunability. However, using Pt in the interconnecting strips results in reduction of the Q-factor.

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