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Mohacsi I, Vartiainen I, Guizar-Sicairos M, et al. High resolution double-sided diffractive optics for hard X-ray microscopy. Opt Express. 2015;23(2):776-86doi: 10.1364/OE.23.000776.
Mohacsi, I., Vartiainen, I., Guizar-Sicairos, M., Karvinen, P., Guzenko, V. A., Müller, E., Färm, E., Ritala, M., Kewish, C. M., Somogyi, A., & David, C. (2015). High resolution double-sided diffractive optics for hard X-ray microscopy. Optics express, 23(2), 776-86. https://doi.org/10.1364/OE.23.000776
Mohacsi, Istvan, et al. "High resolution double-sided diffractive optics for hard X-ray microscopy." Optics express vol. 23,2 (2015): 776-86. doi: https://doi.org/10.1364/OE.23.000776
Mohacsi I, Vartiainen I, Guizar-Sicairos M, Karvinen P, Guzenko VA, Müller E, Färm E, Ritala M, Kewish CM, Somogyi A, David C. High resolution double-sided diffractive optics for hard X-ray microscopy. Opt Express. 2015 Jan 26;23(2):776-86. doi: 10.1364/OE.23.000776. PMID: 25835837.
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Opt Express. 2015 Jan 26;23(2):776-86. doi: 10.1364/OE.23.000776.

High resolution double-sided diffractive optics for hard X-ray microscopy.

Optics express

Istvan Mohacsi, Ismo Vartiainen, Manuel Guizar-Sicairos, Petri Karvinen, Vitaliy A Guzenko, Elisabeth Müller, Elina Färm, Mikko Ritala, Cameron M Kewish, Andrea Somogyi, Christian David

PMID: 25835837 DOI: 10.1364/OE.23.000776

Abstract

The fabrication of high aspect ratio metallic nanostructures is crucial for the production of efficient diffractive X-ray optics in the hard X-ray range. We present a novel method to increase their structure height via the double-sided patterning of the support membrane. In transmission, the two Fresnel zone plates on the two sides of the substrate will act as a single zone plate with added structure height. The presented double-sided zone plates with 30 nm smallest zone width offer up to 9.9% focusing efficiency at 9 keV, that results in a factor of two improvement over their previously demonstrated single-sided counterparts. The increase in efficiency paves the way to speed up X-ray microscopy measurements and allows the more efficient utilization of the flux in full-field X-ray microscopy.

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