Display options
Cite
Han KS, Sung MM. Molecular layer deposition of organic-inorganic hybrid films using diethylzinc and trihydroxybenzene. J Nanosci Nanotechnol. 2014;14(8):6137-42doi: 10.1166/jnn.2014.8448.
Han, K. S., & Sung, M. M. (2014). Molecular layer deposition of organic-inorganic hybrid films using diethylzinc and trihydroxybenzene. Journal of nanoscience and nanotechnology, 14(8), 6137-42. https://doi.org/10.1166/jnn.2014.8448
Han, Kyu S, and Sung, Myung M. "Molecular layer deposition of organic-inorganic hybrid films using diethylzinc and trihydroxybenzene." Journal of nanoscience and nanotechnology vol. 14,8 (2014): 6137-42. doi: https://doi.org/10.1166/jnn.2014.8448
Han KS, Sung MM. Molecular layer deposition of organic-inorganic hybrid films using diethylzinc and trihydroxybenzene. J Nanosci Nanotechnol. 2014 Aug;14(8):6137-42. doi: 10.1166/jnn.2014.8448. PMID: 25936073.
Copy Download .nbib Format: NLM
Share it on

J Nanosci Nanotechnol. 2014 Aug;14(8):6137-42. doi: 10.1166/jnn.2014.8448.

Molecular layer deposition of organic-inorganic hybrid films using diethylzinc and trihydroxybenzene.

Journal of nanoscience and nanotechnology

Kyu S Han, Myung M Sung

PMID: 25936073 DOI: 10.1166/jnn.2014.8448

Abstract

We fabricated organic-inorganic hybrid thin films by using molecular layer deposition with diethylzinc and benzenetriol at temperatures of 100-160 °C. In this MLD process, the surface reactions were found to be self-terminating and complementary enough to make a uniform, conformal, high-quality hybrid thin film. The prepared zinc oxide-crosslinked hydroxybenzene and zinc oxide nanolaminated films (ZnOHB/ZnO) exhibited good stability and field effect mobility (> 0.6 cm2/V · s). The MLD method is an ideal technique for fabrication of various organic-inorganic hybrid thin films.

Publication Types