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Lewis BB, Stanford MG, Fowlkes JD, et al. Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition. Beilstein J Nanotechnol. 2015;6:907-18doi: 10.3762/bjnano.6.94.
Lewis, B. B., Stanford, M. G., Fowlkes, J. D., Lester, K., Plank, H., & Rack, P. D. (2015). Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition. Beilstein journal of nanotechnology, 6907-18. https://doi.org/10.3762/bjnano.6.94
Lewis, Brett B, et al. "Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition." Beilstein journal of nanotechnology vol. 6 (2015): 907-18. doi: https://doi.org/10.3762/bjnano.6.94
Lewis BB, Stanford MG, Fowlkes JD, Lester K, Plank H, Rack PD. Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition. Beilstein J Nanotechnol. 2015 Apr 08;6:907-18. doi: 10.3762/bjnano.6.94. eCollection 2015. PMID: 25977862; PMCID: PMC4419598.
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Beilstein J Nanotechnol. 2015 Apr 08;6:907-18. doi: 10.3762/bjnano.6.94. eCollection 2015.

Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition.

Beilstein journal of nanotechnology

Brett B Lewis, Michael G Stanford, Jason D Fowlkes, Kevin Lester, Harald Plank, Philip D Rack

Affiliations

  1. Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA.
  2. Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA ; Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA.
  3. Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA.
  4. Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria.

PMID: 25977862 PMCID: PMC4419598 DOI: 10.3762/bjnano.6.94

Abstract

Platinum-carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top-down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. In addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.

Keywords: beam induced processing; direct-write; electron beam induced deposition; nano

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