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Nanotechnology. 2015 Jul 10;26(27):275605. doi: 10.1088/0957-4484/26/27/275605. Epub 2015 Jun 18.

Titanium-based silicide quantum dot superlattices for thermoelectrics applications.

Nanotechnology

Guillaume Savelli, Sergio Silveira Stein, Guillaume Bernard-Granger, Pascal Faucherand, Laurent Montès, Stefan Dilhaire, Gilles Pernot

Affiliations

  1. CEA, Liten, Thermoelectricity Laboratory, 17 rue des Martyrs, 38000 Grenoble, France.

PMID: 26086207 DOI: 10.1088/0957-4484/26/27/275605

Abstract

Ti-based silicide quantum dot superlattices (QDSLs) are grown by reduced-pressure chemical vapor deposition. They are made of titanium-based silicide nanodots scattered in an n-doped SiGe matrix. This is the first time that such nanostructured materials have been grown in both monocrystalline and polycrystalline QDSLs. We studied their crystallographic structures and chemical properties, as well as the size and the density of the quantum dots. The thermoelectric properties of the QDSLs are measured and compared to equivalent SiGe thin films to evaluate the influence of the nanodots. Our studies revealed an increase in their thermoelectric properties-specifically, up to a trifold increase in the power factor, with a decrease in the thermal conductivity-making them very good candidates for further thermoelectric applications in cooling or energy-harvesting fields.

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