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Chen YM, Lai YY, Chao YC, et al. Large-Area Nano-patterning and Fabrication of Vertical Transistor Array by Non-close-packed Polystyrene Spheres. ACS Appl Mater Interfaces. 2015;7(34):18899-903doi: 10.1021/acsami.5b03724.
Chen, Y. M., Lai, Y. Y., Chao, Y. C., Zan, H. W., Meng, H. F., Horng, S. F., & Chang, C. H. (2015). Large-Area Nano-patterning and Fabrication of Vertical Transistor Array by Non-close-packed Polystyrene Spheres. ACS applied materials & interfaces, 7(34), 18899-903. https://doi.org/10.1021/acsami.5b03724
Chen, Yen-Ming, et al. "Large-Area Nano-patterning and Fabrication of Vertical Transistor Array by Non-close-packed Polystyrene Spheres." ACS applied materials & interfaces vol. 7,34 (2015): 18899-903. doi: https://doi.org/10.1021/acsami.5b03724
Chen YM, Lai YY, Chao YC, Zan HW, Meng HF, Horng SF, Chang CH. Large-Area Nano-patterning and Fabrication of Vertical Transistor Array by Non-close-packed Polystyrene Spheres. ACS Appl Mater Interfaces. 2015 Sep 02;7(34):18899-903. doi: 10.1021/acsami.5b03724. Epub 2015 Aug 24. PMID: 26278552.
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ACS Appl Mater Interfaces. 2015 Sep 02;7(34):18899-903. doi: 10.1021/acsami.5b03724. Epub 2015 Aug 24.

Large-Area Nano-patterning and Fabrication of Vertical Transistor Array by Non-close-packed Polystyrene Spheres.

ACS applied materials & interfaces

Yen-Ming Chen, Yu-Yen Lai, Yu-Chiang Chao, Hsiao-Wen Zan, Hsin-Fei Meng, Sheng-Fu Horng, Che-Hao Chang

Affiliations

  1. Department of Physics and Center for Nanotechnology, Chung Yuan Christian University , Chung-Li 32023, Taiwan.

PMID: 26278552 DOI: 10.1021/acsami.5b03724

Abstract

We demonstrated a large-area nanopatterning technique with the help of a non-close-packed PS sphere layer over a large-area substrate. The non-close-packed PS sphere layer is fabricated by blade coating method. It was demonstrated that non-close-packed PS spheres can be achieved within an area of 18 cm × 25 cm on a rigid glass substrate and within an area of 10 cm × 10 cm on a flexible substrate. We also demonstrated that the blade-coated non-close-packed PS sphere layer was suitable for the mass production of vertical organic transistors over a large area.

Keywords: large-area nanopattering; nanosphere lithography; organic transistors; polymer transistors; vertical transistors

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