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Spende A, Sobel N, Lukas M, et al. TiO2, SiO2, and Al2O3 coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements. Nanotechnology. 2015;26(33):335301doi: 10.1088/0957-4484/26/33/335301.
Spende, A., Sobel, N., Lukas, M., Zierold, R., Riedl, J. C., Gura, L., Schubert, I., Moreno, J. M., Nielsch, K., Stühn, B., Hess, C., Trautmann, C., & Toimil-Molares, M. E. (2015). TiO2, SiO2, and Al2O3 coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements. Nanotechnology, 26(33), 335301. https://doi.org/10.1088/0957-4484/26/33/335301
Spende, Anne, et al. "TiO2, SiO2, and Al2O3 coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements." Nanotechnology vol. 26,33 (2015): 335301. doi: https://doi.org/10.1088/0957-4484/26/33/335301
Spende A, Sobel N, Lukas M, Zierold R, Riedl JC, Gura L, Schubert I, Moreno JM, Nielsch K, Stühn B, Hess C, Trautmann C, Toimil-Molares ME. TiO2, SiO2, and Al2O3 coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements. Nanotechnology. 2015 Aug 21;26(33):335301. doi: 10.1088/0957-4484/26/33/335301. Epub 2015 Jul 30. PMID: 26225468.
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Nanotechnology. 2015 Aug 21;26(33):335301. doi: 10.1088/0957-4484/26/33/335301. Epub 2015 Jul 30.

TiO2, SiO2, and Al2O3 coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements.

Nanotechnology

Anne Spende, Nicolas Sobel, Manuela Lukas, Robert Zierold, Jesse C Riedl, Leonard Gura, Ina Schubert, Josep M Montero Moreno, Kornelius Nielsch, Bernd Stühn, Christian Hess, Christina Trautmann, Maria E Toimil-Molares

Affiliations

  1. Materialforschung, GSI Helmholtzzentrum für Schwerionenforschung, Darmstadt, Germany. Material- und Geowissenschaften, Technische Universität Darmstadt, Germany.

PMID: 26225468 DOI: 10.1088/0957-4484/26/33/335301

Abstract

Low-temperature atomic layer deposition (ALD) of TiO2, SiO2, and Al2O3 was applied to modify the surface and to tailor the diameter of nanochannels in etched ion-track polycarbonate membranes. The homogeneity, conformity, and composition of the coating inside the nanochannels are investigated for different channel diameters (18-55 nm) and film thicknesses (5-22 nm). Small angle x-ray scattering before and after ALD demonstrates conformal coating along the full channel length. X-ray photoelectron spectroscopy and energy dispersive x-ray spectroscopy provide evidence of nearly stoichiometric composition of the different coatings. By wet-chemical methods, the ALD-deposited film is released from the supporting polymer templates providing 30 μm long self-supporting nanotubes with walls as thin as 5 nm. Electrolytic ion-conductivity measurements provide proof-of-concept that combining ALD coating with ion-track nanotechnology offers promising perspectives for single-pore applications by controlled shrinking of an oversized pore to a preferred smaller diameter and fine-tuning of the chemical and physical nature of the inner channel surface.

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