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Kim Y, Hibino K, Sugita N, et al. Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry. Opt Express. 2015;23(17):22928-38doi: 10.1364/OE.23.022928.
Kim, Y., Hibino, K., Sugita, N., & Mitsuishi, M. (2015). Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry. Optics express, 23(17), 22928-38. https://doi.org/10.1364/OE.23.022928
Kim, Yangjin, et al. "Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry." Optics express vol. 23,17 (2015): 22928-38. doi: https://doi.org/10.1364/OE.23.022928
Kim Y, Hibino K, Sugita N, Mitsuishi M. Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry. Opt Express. 2015 Aug 24;23(17):22928-38. doi: 10.1364/OE.23.022928. PMID: 26368260.
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Opt Express. 2015 Aug 24;23(17):22928-38. doi: 10.1364/OE.23.022928.

Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry.

Optics express

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi

PMID: 26368260 DOI: 10.1364/OE.23.022928

Abstract

This paper presents the derivation of a 17-sample phase-shifting algorithm that can compensate the miscalibration and first-order nonlinearity of phase shift error, coupling error, and bias modulation of the intensity and satisfy the fringe contrast maximum condition. The phase error of measurements performed using the 17-sample algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the optical thickness variation of a BK7 optically transparent plate obtained using a wavelength tuning Fizeau interferometer and the 17-sample algorithm are presented. The experimental results indicate that the optical thickness variation measurement accuracy for the BK7 plate was 3 nm.

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