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O'Connor D, Henning AJ, Sherlock B, et al. Model-based defect detection on structured surfaces having optically unresolved features. Appl Opt. 2015;54(30):8872-7doi: 10.1364/AO.54.008872.
O'Connor, D., Henning, A. J., Sherlock, B., Leach, R. K., Coupland, J., & Giusca, C. L. (2015). Model-based defect detection on structured surfaces having optically unresolved features. Applied optics, 54(30), 8872-7. https://doi.org/10.1364/AO.54.008872
O'Connor, Daniel, et al. "Model-based defect detection on structured surfaces having optically unresolved features." Applied optics vol. 54,30 (2015): 8872-7. doi: https://doi.org/10.1364/AO.54.008872
O'Connor D, Henning AJ, Sherlock B, Leach RK, Coupland J, Giusca CL. Model-based defect detection on structured surfaces having optically unresolved features. Appl Opt. 2015 Oct 20;54(30):8872-7. doi: 10.1364/AO.54.008872. PMID: 26560373.
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Appl Opt. 2015 Oct 20;54(30):8872-7. doi: 10.1364/AO.54.008872.

Model-based defect detection on structured surfaces having optically unresolved features.

Applied optics

Daniel O'Connor, Andrew J Henning, Ben Sherlock, Richard K Leach, Jeremy Coupland, Claudiu L Giusca

PMID: 26560373 DOI: 10.1364/AO.54.008872

Abstract

In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational model that is able to simulate the response of the selected optical inspection system to the ideal structure, thereby providing an ideal measure of deviation from nominal geometry. The method addresses the high dynamic range challenge faced in highly parallel manufacturing by enabling the use of low resolution, wide field of view optical systems for defect detection on surfaces containing small features over large regions.

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