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Hoque S, Ito H, Nishi R, et al. Spherical aberration correction with threefold symmetric line currents. Ultramicroscopy. 2015;161:74-82doi: 10.1016/j.ultramic.2015.11.005.
Hoque, S., Ito, H., Nishi, R., Takaoka, A., & Munro, E. (2016). Spherical aberration correction with threefold symmetric line currents. Ultramicroscopy, 16174-82. https://doi.org/10.1016/j.ultramic.2015.11.005
Hoque, Shahedul, et al. "Spherical aberration correction with threefold symmetric line currents." Ultramicroscopy vol. 161 (2016): 74-82. doi: https://doi.org/10.1016/j.ultramic.2015.11.005
Hoque S, Ito H, Nishi R, Takaoka A, Munro E. Spherical aberration correction with threefold symmetric line currents. Ultramicroscopy. 2016 Feb;161:74-82. doi: 10.1016/j.ultramic.2015.11.005. Epub 2015 Nov 10. PMID: 26630070.
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Ultramicroscopy. 2016 Feb;161:74-82. doi: 10.1016/j.ultramic.2015.11.005. Epub 2015 Nov 10.

Spherical aberration correction with threefold symmetric line currents.

Ultramicroscopy

Shahedul Hoque, Hiroyuki Ito, Ryuji Nishi, Akio Takaoka, Eric Munro

Affiliations

  1. Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, 7-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan; Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
  2. Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
  3. Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, 7-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan.
  4. Munro's Electron Beam Software Ltd., 14 Cornwall Gardens, London SW7 4AN, UK.

PMID: 26630070 DOI: 10.1016/j.ultramic.2015.11.005

Abstract

It has been shown that N-fold symmetric line current (henceforth denoted as N-SYLC) produces 2N-pole magnetic fields. In this paper, a threefold symmetric line current (N3-SYLC in short) is proposed for correcting 3rd order spherical aberration of round lenses. N3-SYLC can be realized without using magnetic materials, which makes it free of the problems of hysteresis, inhomogeneity and saturation. We investigate theoretically the basic properties of an N3-SYLC configuration which can in principle be realized by simple wires. By optimizing the parameters of a system with beam energy of 5.5keV, the required excitation current for correcting 3rd order spherical aberration coefficient of 400 mm is less than 1AT, and the residual higher order aberrations can be kept sufficiently small to obtain beam size of less than 1 nm for initial slopes up to 5 mrad.

Copyright © 2015 Elsevier B.V. All rights reserved.

Keywords: Aberration correction; Hexapole corrector; Magnetic multipole; N-fold symmetric line current; Sextupole corrector; Spherical aberration

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