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Llera M, Aellen T, Hervas J, et al. Liquid-air based Fabry-Pérot cavity on fiber tip sensor. Opt Express. 2016;24(8):8054-65doi: 10.1364/OE.24.008054.
Llera, M., Aellen, T., Hervas, J., Salvadé, Y., Senn, P., Le Floch, S., & Keppner, H. (2016). Liquid-air based Fabry-Pérot cavity on fiber tip sensor. Optics express, 24(8), 8054-65. https://doi.org/10.1364/OE.24.008054
Llera, Miguel, et al. "Liquid-air based Fabry-Pérot cavity on fiber tip sensor." Optics express vol. 24,8 (2016): 8054-65. doi: https://doi.org/10.1364/OE.24.008054
Llera M, Aellen T, Hervas J, Salvadé Y, Senn P, Le Floch S, Keppner H. Liquid-air based Fabry-Pérot cavity on fiber tip sensor. Opt Express. 2016 Apr 18;24(8):8054-65. doi: 10.1364/OE.24.008054. PMID: 27137244.
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Opt Express. 2016 Apr 18;24(8):8054-65. doi: 10.1364/OE.24.008054.

Liquid-air based Fabry-Pérot cavity on fiber tip sensor.

Optics express

Miguel Llera, Thierry Aellen, Javier Hervas, Yves Salvadé, Pascal Senn, Sébastien Le Floch, Herbert Keppner

PMID: 27137244 DOI: 10.1364/OE.24.008054

Abstract

This paper presents a Fabry-Perot fiber tip sensor based on an air-liquid filled cavity. The cavity is sealed off by a thin gold coated membrane of parylene C, between 300 and 350 nm, creating a particularly flexible diaphragm. In order to retrieve and track the cavity of interest from other cavities formed within the sensor tip, a signal processing of the feedback signal is performed by inverse fast Fourier transform. The experimental sensor has been manufactured and tested for temperature, giving cavity length sensitivities of 6.1 nm/°C and 9.6 nm/°C for temperature increase and decrease respectively. The external gas pressure response gives a sensitivity of 15 nm/kPa. The fiber sensor has also been adapted for force sensing after silicone embedment and has shown a sensitivity of about 8.7 nm/mN. Finally, the sensor has been tested on insertion into a human temporal bone, proving that it could be an interesting candidate for insertion force monitoring for robotic cochlear implantation.

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