Display options
Share it on

J Res Natl Inst Stand Technol. 1990 Sep-Oct;95(5):559-574. doi: 10.6028/jres.095.044.

Hard X-Ray Microscope With Submicrometer Spatial Resolution.

Journal of research of the National Institute of Standards and Technology

Masao Kuriyama, Ronald C Dobbyn, Richard D Spal, Harold E Burdette, David R Black

Affiliations

  1. National Institute of Standards and Technology, Gaithersburg, MD 20899.

PMID: 28179792 PMCID: PMC4930020 DOI: 10.6028/jres.095.044

Abstract

A high-resolution hard x-ray microscope is described. This system is capable of detecting line features as small as 0.6

Keywords: CCD detectors; fiber reinforced composite; microtomography; multilayer films; x-ray lens; x-ray microscope

References

  1. Science. 1987 Sep 18;237(4821):1439-44 - PubMed
  2. Rev Sci Instrum. 1979 Jan;50(1):26 - PubMed
  3. Med Phys. 1987 Nov-Dec;14 (6):968-74 - PubMed
  4. J Dent Res. 1985 Jun;64(6):866-9 - PubMed

Publication Types