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Li S, Wan Y, Fan C, et al. Theoretical Study of Monolayer and Double-Layer Waveguide Love Wave Sensors for Achieving High Sensitivity. Sensors (Basel). 2017;17(3)doi: 10.3390/s17030653.
Li, S., Wan, Y., Fan, C., & Su, Y. (2017). Theoretical Study of Monolayer and Double-Layer Waveguide Love Wave Sensors for Achieving High Sensitivity. Sensors (Basel, Switzerland), 17(3), . https://doi.org/10.3390/s17030653
Li, Shuangming, et al. "Theoretical Study of Monolayer and Double-Layer Waveguide Love Wave Sensors for Achieving High Sensitivity." Sensors (Basel, Switzerland) vol. 17,3 (2017). doi: https://doi.org/10.3390/s17030653
Li S, Wan Y, Fan C, Su Y. Theoretical Study of Monolayer and Double-Layer Waveguide Love Wave Sensors for Achieving High Sensitivity. Sensors (Basel). 2017 Mar 22;17(3). doi: 10.3390/s17030653. PMID: 28327504; PMCID: PMC5375939.
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Sensors (Basel). 2017 Mar 22;17(3). doi: 10.3390/s17030653.

Theoretical Study of Monolayer and Double-Layer Waveguide Love Wave Sensors for Achieving High Sensitivity.

Sensors (Basel, Switzerland)

Shuangming Li, Ying Wan, Chunhai Fan, Yan Su

Affiliations

  1. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China. [email protected].
  2. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China. [email protected].
  3. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China. [email protected].
  4. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China. [email protected].

PMID: 28327504 PMCID: PMC5375939 DOI: 10.3390/s17030653

Abstract

Love wave sensors have been widely used for sensing applications. In this work, we introduce the theoretical analysis of the monolayer and double-layer waveguide Love wave sensors. The velocity, particle displacement and energy distribution of Love waves were analyzed. Using the variations of the energy repartition, the sensitivity coefficients of Love wave sensors were calculated. To achieve a higher sensitivity coefficient, a thin gold layer was added as the second waveguide on top of the silicon dioxide (SiO₂) waveguide-based, 36 degree-rotated, Y-cut, X-propagating lithium tantalate (36° YX LiTaO₃) Love wave sensor. The Love wave velocity was significantly reduced by the added gold layer, and the flow of wave energy into the waveguide layer from the substrate was enhanced. By using the double-layer structure, almost a 72-fold enhancement in the sensitivity coefficient was achieved compared to the monolayer structure. Additionally, the thickness of the SiO₂ layer was also reduced with the application of the gold layer, resulting in easier device fabrication. This study allows for the possibility of designing and realizing robust Love wave sensors with high sensitivity and a low limit of detection.

Keywords: SiO2; double-layer; love wave; monolayer; sensors; waveguide

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