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Sensors (Basel). 2017 Apr 16;17(4). doi: 10.3390/s17040877.

Out-of-Plane Continuous Electrostatic Micro-Power Generators.

Sensors (Basel, Switzerland)

M A E Mahmoud, E M Abdel-Rahman, R R Mansour, E F El-Saadany

Affiliations

  1. Department of Electrical and Computer Engineering, Ain Shams University, 1156 Cairo, Egypt. [email protected].
  2. Department of Systems Design Engineering, University of Waterloo, Waterloo, N2L 3G1 ON, Canada. [email protected].
  3. Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, N2L 3G1 ON, Canada. [email protected].
  4. Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, N2L 3G1 ON, Canada. [email protected].

PMID: 28420151 PMCID: PMC5424754 DOI: 10.3390/s17040877

Abstract

This paper presents an out-of-plane electrostatic micro-power generator (MPG). Electret-based continuous MPGs with different gaps and masses are fabricated to demonstrate the merits of this topology. Experimental results of the MPG demonstrate output power of 1 mW for a base acceleration amplitude and frequency of 0.08 g and 86 Hz. The MPGs also demonstrate a wideband harvesting bandwidth reaching up to 9 Hz. A free-flight and an impact mode model of electrostatic MPGs are also derived and validated by comparison to experimental results.

Keywords: electrostatic; micro-power generators; out-of-plane; wideband

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