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Zhang J, Zhang L, Wang W, et al. Contact electrification induced interfacial reactions and direct electrochemical nanoimprint lithography in n-type gallium arsenate wafer. Chem Sci. 2016;8(3):2407-2412doi: 10.1039/c6sc04091h.
Zhang, J., Zhang, L., Wang, W., Han, L., Jia, J. C., Tian, Z. W., Tian, Z. Q., & Zhan, D. (2017). Contact electrification induced interfacial reactions and direct electrochemical nanoimprint lithography in n-type gallium arsenate wafer. Chemical science, 8(3), 2407-2412. https://doi.org/10.1039/c6sc04091h
Zhang, Jie, et al. "Contact electrification induced interfacial reactions and direct electrochemical nanoimprint lithography in n-type gallium arsenate wafer." Chemical science vol. 8,3 (2017): 2407-2412. doi: https://doi.org/10.1039/c6sc04091h
Zhang J, Zhang L, Wang W, Han L, Jia JC, Tian ZW, Tian ZQ, Zhan D. Contact electrification induced interfacial reactions and direct electrochemical nanoimprint lithography in n-type gallium arsenate wafer. Chem Sci. 2017 Mar 01;8(3):2407-2412. doi: 10.1039/c6sc04091h. Epub 2016 Dec 16. PMID: 28451347; PMCID: PMC5369340.
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Chem Sci. 2017 Mar 01;8(3):2407-2412. doi: 10.1039/c6sc04091h. Epub 2016 Dec 16.

Contact electrification induced interfacial reactions and direct electrochemical nanoimprint lithography in n-type gallium arsenate wafer.

Chemical science

Jie Zhang, Lin Zhang, Wei Wang, Lianhuan Han, Jing-Chun Jia, Zhao-Wu Tian, Zhong-Qun Tian, Dongping Zhan

Affiliations

  1. State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS) , Collaborative Innovation Centre of Chemistry for Energy Materials (iChEM) , Department of Chemistry , College of Chemistry and Chemical Engineering , Xiamen University , Xiamen 361005 , China . Email: [email protected].

PMID: 28451347 PMCID: PMC5369340 DOI: 10.1039/c6sc04091h

Abstract

Although metal assisted chemical etching (MacEtch) has emerged as a versatile micro-nanofabrication method for semiconductors, the chemical mechanism remains ambiguous in terms of both thermodynamics and kinetics. Here we demonstrate an innovative phenomenon,

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