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Hara S, Wada H, Shimojima A, et al. Formation of Nanogrooves with Sub-5 nm Periodicity Using Local Silicification at the Interspace between a Si Substrate and Lyotropic Liquid Crystals. ACS Nano. 2017;11(5):5160-5166doi: 10.1021/acsnano.7b02357.
Hara, S., Wada, H., Shimojima, A., & Kuroda, K. (2017). Formation of Nanogrooves with Sub-5 nm Periodicity Using Local Silicification at the Interspace between a Si Substrate and Lyotropic Liquid Crystals. ACS nano, 11(5), 5160-5166. https://doi.org/10.1021/acsnano.7b02357
Hara, Shintaro, et al. "Formation of Nanogrooves with Sub-5 nm Periodicity Using Local Silicification at the Interspace between a Si Substrate and Lyotropic Liquid Crystals." ACS nano vol. 11,5 (2017): 5160-5166. doi: https://doi.org/10.1021/acsnano.7b02357
Hara S, Wada H, Shimojima A, Kuroda K. Formation of Nanogrooves with Sub-5 nm Periodicity Using Local Silicification at the Interspace between a Si Substrate and Lyotropic Liquid Crystals. ACS Nano. 2017 May 23;11(5):5160-5166. doi: 10.1021/acsnano.7b02357. Epub 2017 May 12. PMID: 28481508.
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ACS Nano. 2017 May 23;11(5):5160-5166. doi: 10.1021/acsnano.7b02357. Epub 2017 May 12.

Formation of Nanogrooves with Sub-5 nm Periodicity Using Local Silicification at the Interspace between a Si Substrate and Lyotropic Liquid Crystals.

ACS nano

Shintaro Hara, Hiroaki Wada, Atsushi Shimojima, Kazuyuki Kuroda

Affiliations

  1. Department of Advanced Science and Engineering, Faculty of Science and Engineering, Waseda University , 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan.
  2. Department of Applied Chemistry, Faculty of Science and Engineering, Waseda University , 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-8555, Japan.
  3. Kagami Memorial Research Institute for Materials Science and Technology, Waseda University , 2-8-26 Nishiwaseda, Shinjuku-ku, Tokyo 169-0051, Japan.

PMID: 28481508 DOI: 10.1021/acsnano.7b02357

Abstract

Bottom-up fabrication of nanopatterns with single nanometer-scale periodicity is quite challenging. In this study, we have focused on the use of the outermost convex surfaces of lyotropic liquid crystals (LLCs) as a template. Periodically arrayed single nanometer-scale nanogrooves consisting of silica are successfully formed on a Si substrate covered with LLCs composed of cylindrical micelles of cetyltrimethylammonium chloride. Soluble silicate species are generated from the Si substrate by a treatment with an NH

Keywords: liquid crystals; nanoimprint mold; nanopattern; silicification; template

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