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Ultrasonics. 2017 Nov;81:135-139. doi: 10.1016/j.ultras.2017.06.019. Epub 2017 Jun 23.

Super high sensitive plate acoustic wave humidity sensor based on graphene oxide film.

Ultrasonics

Iren E Kuznetsova, Vladimir I Anisimkin, Sergei P Gubin, Sergei V Tkachev, Vladimir V Kolesov, Vadim V Kashin, Boris D Zaitsev, Alexander M Shikhabudinov, Enrico Verona, Shaorong Sun

Affiliations

  1. Kotelnikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia; Management School, University of Shanghai for Science and Technology, 516 Jungong Road, Shanghai 200093, PR China. Electronic address: [email protected].
  2. Kotelnikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia.
  3. Kurnakov Institute of General and Inorganic Chemistry of RAS, Moscow 119991, Russia. Electronic address: [email protected].
  4. Kurnakov Institute of General and Inorganic Chemistry of RAS, Moscow 119991, Russia.
  5. Kotelnikov Institute of Radio Engineering and Electronics of RAS, Saratov Branch, Saratov 410019, Russia. Electronic address: [email protected].
  6. Kotelnikov Institute of Radio Engineering and Electronics of RAS, Saratov Branch, Saratov 410019, Russia.
  7. Kotelnikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia; Institute for Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy. Electronic address: [email protected].
  8. Management School, University of Shanghai for Science and Technology, 516 Jungong Road, Shanghai 200093, PR China. Electronic address: [email protected].

PMID: 28666106 DOI: 10.1016/j.ultras.2017.06.019

Abstract

The changes of density and elastic modules due to water vapor adsorption are measured for graphene oxide film at room temperature. Dominant mechanism for acoustic wave humidity sensing by the film is shown to be related with variation of its electric conductivity. Basing on the data, super high sensitive humidity sensor employing high-order Lamb wave with large coupling constant, standard lithium niobate plate, and graphene oxide sorbent film is developed. The minimal detectable level of the sensor is as low 0.03% RH, response times are 60/120s, and reproducibility is ±2.5%. The sensor is completely selective towards H

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