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Hoque S, Ito H, Takaoka A, et al. Axial geometrical aberration correction up to 5th order with N-SYLC. Ultramicroscopy. 2017;182:68-80doi: 10.1016/j.ultramic.2017.06.014.
Hoque, S., Ito, H., Takaoka, A., & Nishi, R. (2017). Axial geometrical aberration correction up to 5th order with N-SYLC. Ultramicroscopy, 18268-80. https://doi.org/10.1016/j.ultramic.2017.06.014
Hoque, Shahedul, et al. "Axial geometrical aberration correction up to 5th order with N-SYLC." Ultramicroscopy vol. 182 (2017): 68-80. doi: https://doi.org/10.1016/j.ultramic.2017.06.014
Hoque S, Ito H, Takaoka A, Nishi R. Axial geometrical aberration correction up to 5th order with N-SYLC. Ultramicroscopy. 2017 Nov;182:68-80. doi: 10.1016/j.ultramic.2017.06.014. Epub 2017 Jun 20. PMID: 28666137.
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Ultramicroscopy. 2017 Nov;182:68-80. doi: 10.1016/j.ultramic.2017.06.014. Epub 2017 Jun 20.

Axial geometrical aberration correction up to 5th order with N-SYLC.

Ultramicroscopy

Shahedul Hoque, Hiroyuki Ito, Akio Takaoka, Ryuji Nishi

Affiliations

  1. Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, 7-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan; Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka, Ibaraki 312-8504, Japan. Electronic address: [email protected].
  2. Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
  3. Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, 7-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan.

PMID: 28666137 DOI: 10.1016/j.ultramic.2017.06.014

Abstract

We present N-SYLC (N-fold symmetric line currents) models to correct 5th order axial geometrical aberrations in electron microscopes. In our previous paper, we showed that 3rd order spherical aberration can be corrected by 3-SYLC doublet. After that, mainly the 5th order aberrations remain to limit the resolution. In this paper, we extend the doublet to quadruplet models also including octupole and dodecapole fields for correcting these higher order aberrations, without introducing any new unwanted ones. We prove the validity of our models by analytical calculations. Also by computer simulations, we show that for beam energy of 5keV and initial angle 10mrad at the corrector object plane, beam size of less than 0.5nm is achieved at the corrector image plane.

Copyright © 2017 Elsevier B.V. All rights reserved.

Keywords: 5th order spherical aberration; Aberration correction; Hexapole corrector; N-fold symmetric line currents; Sextupole corrector; Sixfold astigmatism

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