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van Es MH, Mohtashami A, Thijssen RMT, et al. Mapping buried nanostructures using subsurface ultrasonic resonance force microscopy. Ultramicroscopy. 2017;184:209-216doi: 10.1016/j.ultramic.2017.09.005.
van Es, M. H., Mohtashami, A., Thijssen, R. M. T., Piras, D., van Neer, P. L. M. J., & Sadeghian, H. (2018). Mapping buried nanostructures using subsurface ultrasonic resonance force microscopy. Ultramicroscopy, 184209-216. https://doi.org/10.1016/j.ultramic.2017.09.005
van Es, Maarten H, et al. "Mapping buried nanostructures using subsurface ultrasonic resonance force microscopy." Ultramicroscopy vol. 184 (2018): 209-216. doi: https://doi.org/10.1016/j.ultramic.2017.09.005
van Es MH, Mohtashami A, Thijssen RMT, Piras D, van Neer PLMJ, Sadeghian H. Mapping buried nanostructures using subsurface ultrasonic resonance force microscopy. Ultramicroscopy. 2018 Jan;184:209-216. doi: 10.1016/j.ultramic.2017.09.005. Epub 2017 Sep 23. PMID: 28968522.
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Ultramicroscopy. 2018 Jan;184:209-216. doi: 10.1016/j.ultramic.2017.09.005. Epub 2017 Sep 23.

Mapping buried nanostructures using subsurface ultrasonic resonance force microscopy.

Ultramicroscopy

Maarten H van Es, Abbas Mohtashami, Rutger M T Thijssen, Daniele Piras, Paul L M J van Neer, Hamed Sadeghian

Affiliations

  1. NOMI, Optomechatronics, TNO, Stieltjesweg 1, 2628CK, Delft, The Netherlands.
  2. NOMI, Optomechatronics, TNO, Stieltjesweg 1, 2628CK, Delft, The Netherlands. Electronic address: [email protected].

PMID: 28968522 DOI: 10.1016/j.ultramic.2017.09.005

Abstract

Nondestructive subsurface nanoimaging of buried nanostructures is considered to be extremely challenging and is essential for the reliable manufacturing of nanotechnology products such as three-dimensional (3D) transistors, 3D NAND memory, and future quantum electronics. In scanning probe microscopy (SPM), a microcantilever with a sharp tip can measure the properties of a surface with nanometer resolution. SPM combined with ultrasound excitation, known as ultrasound SPM, has shown the capability to image buried nanoscale features. In this paper, the development of a modified type of ultrasound SPM called subsurface ultrasonic resonance force microscopy (SSURFM) is reported. The capability and versatility of this method is demonstrated by the subsurface imaging of various samples including rigid structures buried under a soft matrix (aluminum under a polymer), rigid structures buried under multiple layers (aluminum under a polymer and titanium layer), and rigid structures under a rigid matrix (aluminum under silicon oxide). Furthermore, tuning and optimization of the image contrast are reported. The experimental results provide possible new industrial metrology and inspection solutions for nanostructures buried below the surface.

Copyright © 2017 Elsevier B.V. All rights reserved.

Keywords: Buried features; Scanning probe; Subsurface microscopy; Ultrasound

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