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Fedorov F, Vasilkov M, Lashkov A, et al. Toward new gas-analytical multisensor chips based on titanium oxide nanotube array. Sci Rep. 2017;7(1):9732doi: 10.1038/s41598-017-10495-8.
Fedorov, F., Vasilkov, M., Lashkov, A., Varezhnikov, A., Fuchs, D., Kübel, C., Bruns, M., Sommer, M., & Sysoev, V. (2017). Toward new gas-analytical multisensor chips based on titanium oxide nanotube array. Scientific reports, 7(1), 9732. https://doi.org/10.1038/s41598-017-10495-8
Fedorov, Fedor, et al. "Toward new gas-analytical multisensor chips based on titanium oxide nanotube array." Scientific reports vol. 7,1 (2017): 9732. doi: https://doi.org/10.1038/s41598-017-10495-8
Fedorov F, Vasilkov M, Lashkov A, Varezhnikov A, Fuchs D, Kübel C, Bruns M, Sommer M, Sysoev V. Toward new gas-analytical multisensor chips based on titanium oxide nanotube array. Sci Rep. 2017 Aug 29;7(1):9732. doi: 10.1038/s41598-017-10495-8. PMID: 28852172; PMCID: PMC5575241.
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Sci Rep. 2017 Aug 29;7(1):9732. doi: 10.1038/s41598-017-10495-8.

Toward new gas-analytical multisensor chips based on titanium oxide nanotube array.

Scientific reports

Fedor Fedorov, Michail Vasilkov, Andrey Lashkov, Alexey Varezhnikov, Dirk Fuchs, Christian Kübel, Michael Bruns, Martin Sommer, Victor Sysoev

Affiliations

  1. Skolkovo Institute of Science and Technology, Skolkovo Innovation Center, 3 Nobel str., Moscow, Russian Federation. [email protected].
  2. V. A. Kotel'nikov Institute of RadioEngineering and Electronics of Russian Academy of Science, Saratov Branch, 38 Zelenaya str., Saratov, Russian Federation.
  3. Yuri Gagarin State Technical University of Saratov, 77 Polytechnicheskaya str., Saratov, Russian Federation.
  4. Institute for Solid-State Physics, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, Germany.
  5. Institute of Nanotechnology and Karlsruhe Nano Micro Facility, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, Germany.
  6. Institute for Applied Materials and Karlsruhe Nano Micro Facility, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, Germany.
  7. Institute for Microstructure Technology, Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, Eggenstein-Leopoldshafen, Germany.
  8. Yuri Gagarin State Technical University of Saratov, 77 Polytechnicheskaya str., Saratov, Russian Federation. [email protected].
  9. Department of Functional Nanosystems and High-Temperature Materials, National University of Science and Technology "MISIS", Leninskiy pr. 4, Moscow, Russia. [email protected].

PMID: 28852172 PMCID: PMC5575241 DOI: 10.1038/s41598-017-10495-8

Abstract

Reliable environmental monitoring requires cost effective but highly sensitive and selective gas sensors. While the sensitivity of the sensors is improved by reducing the characteristic dimensions of the gas-sensing material, the selectivity is often approached by combining the sensors into multisensor arrays. The development of scalable methods to manufacture such arrays based on low-dimensional structures offers new perspectives for gas sensing applications. Here we examine an approach to produce multisensor array chips based on the TiO

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