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Behera S, Joseph J. Design and fabrication of woodpile photonic structures through phase SLM-based interference lithography for omnidirectional optical filters. Opt Lett. 2017;42(13):2607-2610doi: 10.1364/OL.42.002607.
Behera, S., & Joseph, J. (2017). Design and fabrication of woodpile photonic structures through phase SLM-based interference lithography for omnidirectional optical filters. Optics letters, 42(13), 2607-2610. https://doi.org/10.1364/OL.42.002607
Behera, Saraswati, and Joseph, Joby. "Design and fabrication of woodpile photonic structures through phase SLM-based interference lithography for omnidirectional optical filters." Optics letters vol. 42,13 (2017): 2607-2610. doi: https://doi.org/10.1364/OL.42.002607
Behera S, Joseph J. Design and fabrication of woodpile photonic structures through phase SLM-based interference lithography for omnidirectional optical filters. Opt Lett. 2017 Jul 01;42(13):2607-2610. doi: 10.1364/OL.42.002607. PMID: 28957296.
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Opt Lett. 2017 Jul 01;42(13):2607-2610. doi: 10.1364/OL.42.002607.

Design and fabrication of woodpile photonic structures through phase SLM-based interference lithography for omnidirectional optical filters.

Optics letters

Saraswati Behera, Joby Joseph

PMID: 28957296 DOI: 10.1364/OL.42.002607

Abstract

In this Letter, we report a large-area and single-step optical fabrication technique based on phase engineering interference lithography that is scalable and reconfigurable for the realization of submicrometer scale periodic face-centered cubic inverse woodpile photonic structures. The realized inverse woodpile structure on positive having four number axial layers with 740 nm spatial and 1046 nm axial periodicities shows 10% reflectance and 90% transmittance at 776 nm wavelength that can further be improved for the addition of axial layers. The realized structure can be transferred to crystalline silicon for realizing a bandpass/rejection near-infrared filter in a reflection/transmission mode. Further, woodpile structures based on low-contrast silicon nitride (Si

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