Display options
Share it on

Ultramicroscopy. 2018 Jan;184:44-51. doi: 10.1016/j.ultramic.2017.10.006. Epub 2017 Oct 12.

Application of the pattern matching approach for EBSD calibration and orientation mapping, utilising dynamical EBSP simulations.

Ultramicroscopy

T Friedrich, A Bochmann, J Dinger, S Teichert

Affiliations

  1. Department of SciTec, University of Applied Sciences, Carl-Zeiss-Promenade 2, D-07745 Jena, Germany. Electronic address: [email protected].
  2. Department of SciTec, University of Applied Sciences, Carl-Zeiss-Promenade 2, D-07745 Jena, Germany.

PMID: 29096393 DOI: 10.1016/j.ultramic.2017.10.006

Abstract

In this paper an alternative method of off-line Kikuchi pattern centre calibration and orientation mapping, utilising the cross-correlation between entire experimental patterns and dynamical simulated patterns is applied and evaluated. To demonstrate the improvement in angular resolution compared to Hough transform based methods, EBSD datasets of a silicon monocrystal were analysed using both, classical and the presented cross-correlation based method, which revealed significant enhancement of angular resolution for the refined method. The mean misorientation over the monocrystalline sample was found to be up to one order of magnitude lower compared to common methods, with an angular resolution of up to 0.06° indicating a substantial gain in orientation precision. The pattern centres were determined for a number of patterns on the map, using pattern matching refinement as well. Subsequently, a multiple linear regression model was computed to correlate pattern centre positions (X

Copyright © 2017 Elsevier B.V. All rights reserved.

Keywords: Angular resolution; Calibration; Cross-correlation; Dynamical simulation; EBSD; Pattern matching

Publication Types