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Adaniya H, Cheung M, Cassidy C, et al. Development of a SEM-based low-energy in-line electron holography microscope for individual particle imaging. Ultramicroscopy. 2018;188:31-40doi: 10.1016/j.ultramic.2018.03.002.
Adaniya, H., Cheung, M., Cassidy, C., Yamashita, M., & Shintake, T. (2018). Development of a SEM-based low-energy in-line electron holography microscope for individual particle imaging. Ultramicroscopy, 18831-40. https://doi.org/10.1016/j.ultramic.2018.03.002
Adaniya, Hidehito, et al. "Development of a SEM-based low-energy in-line electron holography microscope for individual particle imaging." Ultramicroscopy vol. 188 (2018): 31-40. doi: https://doi.org/10.1016/j.ultramic.2018.03.002
Adaniya H, Cheung M, Cassidy C, Yamashita M, Shintake T. Development of a SEM-based low-energy in-line electron holography microscope for individual particle imaging. Ultramicroscopy. 2018 May;188:31-40. doi: 10.1016/j.ultramic.2018.03.002. Epub 2018 Mar 06. PMID: 29544194.
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Ultramicroscopy. 2018 May;188:31-40. doi: 10.1016/j.ultramic.2018.03.002. Epub 2018 Mar 06.

Development of a SEM-based low-energy in-line electron holography microscope for individual particle imaging.

Ultramicroscopy

Hidehito Adaniya, Martin Cheung, Cathal Cassidy, Masao Yamashita, Tsumoru Shintake

Affiliations

  1. Okinawa Institute of Science and Technology Graduate University, 1919-1 Tancha, Onna-son, Okinawa 904-0495, Japan. Electronic address: [email protected].
  2. Okinawa Institute of Science and Technology Graduate University, 1919-1 Tancha, Onna-son, Okinawa 904-0495, Japan.

PMID: 29544194 DOI: 10.1016/j.ultramic.2018.03.002

Abstract

A new SEM-based in-line electron holography microscope has been under development. The microscope utilizes conventional SEM and BF-STEM functionality to allow for rapid searching of the specimen of interest, seamless interchange between SEM, BF-STEM and holographic imaging modes, and makes use of coherent low-energy in-line electron holography to obtain low-dose, high-contrast images of light element materials. We report here an overview of the instrumentation and first experimental results on gold nano-particles and carbon nano-fibers for system performance tests. Reconstructed images obtained from the holographic imaging mode of the new microscope show substantial image contrast and resolution compared to those acquired by SEM and BF-STEM modes, demonstrating the feasibility of high-contrast imaging via low-energy in-line electron holography. The prospect of utilizing the new microscope to image purified biological specimens at the individual particle level is discussed and electron optical issues and challenges to further improve resolution and contrast are considered.

Copyright © 2018 Elsevier B.V. All rights reserved.

Keywords: Apparatus development; Coherence; Contrast; In-line holography; Low energy electron microscope; Resolution; SEM based

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